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• W4233839976 endingPage "090204" @default.
• W4233839976 startingPage "090204" @default.
• W4233839976 abstract "This paper reports on the thermal improvement of Si3N4/GeNx/Ge structures. After the Si3N4 (5 nm)/GeNx (2 nm) stacks were prepared on Ge substrates by electron-cyclotron-resonance plasma nitridation and sputtering at room temperature, they were thermally annealed in atmospheric N2 + 10% H2 ambient at temperatures from 400 to 600 °C. It was demonstrated that the electronic properties of the GeNx/Ge interfaces were thermally improved at temperatures of up to 500 °C with a minimum interface trap density (Dit) of ∼1×1011 cm-2 eV-1 near the Ge midgap, whereas the interface properties were slightly degraded after annealing at 600 °C with a minimum Dit value of ∼4×1011 cm-2 eV-1." @default.
• W4233839976 created "2022-05-12" @default.
• W4233839976 creator A5008742907 @default.
• W4233839976 creator A5010743217 @default.
• W4233839976 creator A5029249568 @default.
• W4233839976 creator A5036814343 @default.
• W4233839976 creator A5062479638 @default.
• W4233839976 creator A5064170261 @default.
• W4233839976 creator A5077280543 @default.
• W4233839976 date "2012-09-01" @default.
• W4233839976 modified "2023-09-25" @default.
• W4233839976 title "Thermal Improvement and Stability of Si3N4/GeNx/p- and n-Ge Structures Prepared by Electron-Cyclotron-Resonance Plasma Nitridation and Sputtering at Room Temperature" @default.
• W4233839976 cites W1579234055 @default.
• W4233839976 cites W1604928733 @default.
• W4233839976 cites W1964057310 @default.
• W4233839976 cites W1980125030 @default.
• W4233839976 cites W1982701132 @default.
• W4233839976 cites W1986783343 @default.
• W4233839976 cites W2007619360 @default.
• W4233839976 cites W2021527533 @default.
• W4233839976 cites W2042002599 @default.
• W4233839976 cites W2043552791 @default.
• W4233839976 cites W2043928798 @default.
• W4233839976 cites W2046109959 @default.
• W4233839976 cites W2059032989 @default.
• W4233839976 cites W2066335865 @default.
• W4233839976 cites W2084698431 @default.
• W4233839976 cites W2090214562 @default.
• W4233839976 cites W2106619646 @default.
• W4233839976 cites W2122913476 @default.
• W4233839976 cites W2152735266 @default.
• W4233839976 cites W1988751086 @default.
• W4233839976 doi "https://doi.org/10.7567/jjap.51.090204" @default.
• W4233839976 hasPublicationYear "2012" @default.
• W4233839976 type Work @default.
• W4233839976 citedByCount "0" @default.
• W4233839976 crossrefType "journal-article" @default.
• W4233839976 hasAuthorship W4233839976A5008742907 @default.
• W4233839976 hasAuthorship W4233839976A5010743217 @default.
• W4233839976 hasAuthorship W4233839976A5029249568 @default.
• W4233839976 hasAuthorship W4233839976A5036814343 @default.
• W4233839976 hasAuthorship W4233839976A5062479638 @default.
• W4233839976 hasAuthorship W4233839976A5064170261 @default.
• W4233839976 hasAuthorship W4233839976A5077280543 @default.
• W4233839976 hasConcept C113196181 @default.
• W4233839976 hasConcept C121332964 @default.
• W4233839976 hasConcept C145148216 @default.
• W4233839976 hasConcept C159985019 @default.
• W4233839976 hasConcept C171250308 @default.
• W4233839976 hasConcept C175361016 @default.
• W4233839976 hasConcept C178790620 @default.
• W4233839976 hasConcept C185592680 @default.
• W4233839976 hasConcept C19067145 @default.
• W4233839976 hasConcept C192562407 @default.
• W4233839976 hasConcept C22175881 @default.
• W4233839976 hasConcept C22423302 @default.
• W4233839976 hasConcept C2777855556 @default.
• W4233839976 hasConcept C43617362 @default.
• W4233839976 hasConcept C49040817 @default.
• W4233839976 hasConcept C544956773 @default.
• W4233839976 hasConcept C550623735 @default.
• W4233839976 hasConcept C59061564 @default.
• W4233839976 hasConcept C62520636 @default.
• W4233839976 hasConcept C82706917 @default.
• W4233839976 hasConceptScore W4233839976C113196181 @default.
• W4233839976 hasConceptScore W4233839976C121332964 @default.
• W4233839976 hasConceptScore W4233839976C145148216 @default.
• W4233839976 hasConceptScore W4233839976C159985019 @default.
• W4233839976 hasConceptScore W4233839976C171250308 @default.
• W4233839976 hasConceptScore W4233839976C175361016 @default.
• W4233839976 hasConceptScore W4233839976C178790620 @default.
• W4233839976 hasConceptScore W4233839976C185592680 @default.
• W4233839976 hasConceptScore W4233839976C19067145 @default.
• W4233839976 hasConceptScore W4233839976C192562407 @default.
• W4233839976 hasConceptScore W4233839976C22175881 @default.
• W4233839976 hasConceptScore W4233839976C22423302 @default.
• W4233839976 hasConceptScore W4233839976C2777855556 @default.
• W4233839976 hasConceptScore W4233839976C43617362 @default.
• W4233839976 hasConceptScore W4233839976C49040817 @default.
• W4233839976 hasConceptScore W4233839976C544956773 @default.
• W4233839976 hasConceptScore W4233839976C550623735 @default.
• W4233839976 hasConceptScore W4233839976C59061564 @default.
• W4233839976 hasConceptScore W4233839976C62520636 @default.
• W4233839976 hasConceptScore W4233839976C82706917 @default.
• W4233839976 hasIssue "9R" @default.
• W4233839976 hasLocation W42338399761 @default.
• W4233839976 hasOpenAccess W4233839976 @default.
• W4233839976 hasPrimaryLocation W42338399761 @default.
• W4233839976 hasRelatedWork W1507159014 @default.
• W4233839976 hasRelatedWork W1971602511 @default.
• W4233839976 hasRelatedWork W2053756260 @default.
• W4233839976 hasRelatedWork W2090831271 @default.
• W4233839976 hasRelatedWork W2091765834 @default.
• W4233839976 hasRelatedWork W2131118855 @default.
• W4233839976 hasRelatedWork W2326195146 @default.
• W4233839976 hasRelatedWork W4233839976 @default.
• W4233839976 hasRelatedWork W44636448 @default.
• W4233839976 hasRelatedWork W2040700392 @default.

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