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- W4233940669 abstract "In the development of silicon based micromachining two quite different technologies have emerged, those of bulk and surface micromachining. Today both technologies are widely available and are still being further developed. There are considerable differences in the processing technologies of the two techniques leading to differences in the structures which can be fabricated. In some applications the technologies are in direct competition, whereas some are dominated by one or the other. This paper will present the advantages and disadvantages of each technology in the contest for applications." @default.
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- W4233940669 date "1998-06-01" @default.
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- W4233940669 title "Surface versus bulk micromachining: the contest for suitable applications" @default.
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- W4233940669 doi "https://doi.org/10.1088/0960-1317/8/2/002" @default.
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