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- W4234857428 abstract "For (sub-)22nm nodes, new device architectures such as multi-gate FinFET-based devices have long been regarded an attractive option to allow further CMOS scaling thanks to their improved electrostatics and reduced VT-variability [1]. In this work, we address the need for processes compatible with their 3D-architecture by reporting on a novel EWF engineering approach [2] which enables wide VT-modulation (>500mV ΔVT in narrow fin (WFin≥5nm), triple-gate FinFETs in Fig. 1), with no EOT nor JG penalty, improved mobility and BTI, excellent mismatch performance, up to ~6.3× reduced noise (Fig. 2), and minimized parasitic Rgate and σ(Rgate), while suitable also for scaled planar FETs where larger EWF shifts from mid-gap to reach low or high-VT targets are needed. It relies on diffusion mechanisms in the gate stack, namely controlled Al diffusion from the fill-metal (CoxAly) through an ultra-thin TaN layer into the TiN covering the high-k dielectric (e.g., HfO2), and fine-tuned TiN/TaN thicknesses. Since Al-rich TiN has a more n-type EWF, stacks with higher amount of Al diffused into TiN translate into lower EWF values (→ lower NMOS VT), with TiN growth optimized for enhanced (NMOS) or inhibited (PMOS) Al diffusion into/through it." @default.
- W4234857428 created "2022-05-12" @default.
- W4234857428 date "2014-01-01" @default.
- W4234857428 modified "2023-09-26" @default.
- W4234857428 title "(Invited) Replacement Metal Gate/High-k Last Technology for Aggressively Scaled Planar and FinFET-Based Devices" @default.
- W4234857428 doi "https://doi.org/10.1149/ma2014-01/36/1370" @default.
- W4234857428 hasPublicationYear "2014" @default.
- W4234857428 type Work @default.
- W4234857428 citedByCount "0" @default.
- W4234857428 crossrefType "journal-article" @default.
- W4234857428 hasConcept C119599485 @default.
- W4234857428 hasConcept C121684516 @default.
- W4234857428 hasConcept C127413603 @default.
- W4234857428 hasConcept C131017901 @default.
- W4234857428 hasConcept C133386390 @default.
- W4234857428 hasConcept C134786449 @default.
- W4234857428 hasConcept C16317505 @default.
- W4234857428 hasConcept C165801399 @default.
- W4234857428 hasConcept C172385210 @default.
- W4234857428 hasConcept C191897082 @default.
- W4234857428 hasConcept C192562407 @default.
- W4234857428 hasConcept C197162436 @default.
- W4234857428 hasConcept C2361726 @default.
- W4234857428 hasConcept C24326235 @default.
- W4234857428 hasConcept C27050352 @default.
- W4234857428 hasConcept C2778413303 @default.
- W4234857428 hasConcept C41008148 @default.
- W4234857428 hasConcept C46362747 @default.
- W4234857428 hasConcept C49040817 @default.
- W4234857428 hasConcept C51140833 @default.
- W4234857428 hasConcept C525849907 @default.
- W4234857428 hasConcept C557185 @default.
- W4234857428 hasConceptScore W4234857428C119599485 @default.
- W4234857428 hasConceptScore W4234857428C121684516 @default.
- W4234857428 hasConceptScore W4234857428C127413603 @default.
- W4234857428 hasConceptScore W4234857428C131017901 @default.
- W4234857428 hasConceptScore W4234857428C133386390 @default.
- W4234857428 hasConceptScore W4234857428C134786449 @default.
- W4234857428 hasConceptScore W4234857428C16317505 @default.
- W4234857428 hasConceptScore W4234857428C165801399 @default.
- W4234857428 hasConceptScore W4234857428C172385210 @default.
- W4234857428 hasConceptScore W4234857428C191897082 @default.
- W4234857428 hasConceptScore W4234857428C192562407 @default.
- W4234857428 hasConceptScore W4234857428C197162436 @default.
- W4234857428 hasConceptScore W4234857428C2361726 @default.
- W4234857428 hasConceptScore W4234857428C24326235 @default.
- W4234857428 hasConceptScore W4234857428C27050352 @default.
- W4234857428 hasConceptScore W4234857428C2778413303 @default.
- W4234857428 hasConceptScore W4234857428C41008148 @default.
- W4234857428 hasConceptScore W4234857428C46362747 @default.
- W4234857428 hasConceptScore W4234857428C49040817 @default.
- W4234857428 hasConceptScore W4234857428C51140833 @default.
- W4234857428 hasConceptScore W4234857428C525849907 @default.
- W4234857428 hasConceptScore W4234857428C557185 @default.
- W4234857428 hasLocation W42348574281 @default.
- W4234857428 hasOpenAccess W4234857428 @default.
- W4234857428 hasPrimaryLocation W42348574281 @default.
- W4234857428 hasRelatedWork W1498080277 @default.
- W4234857428 hasRelatedWork W1499398507 @default.
- W4234857428 hasRelatedWork W1970052784 @default.
- W4234857428 hasRelatedWork W2060944147 @default.
- W4234857428 hasRelatedWork W2103234243 @default.
- W4234857428 hasRelatedWork W2126351224 @default.
- W4234857428 hasRelatedWork W2128795533 @default.
- W4234857428 hasRelatedWork W2152473135 @default.
- W4234857428 hasRelatedWork W2525763591 @default.
- W4234857428 hasRelatedWork W2545564276 @default.
- W4234857428 isParatext "false" @default.
- W4234857428 isRetracted "false" @default.
- W4234857428 workType "article" @default.