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- W4234920674 abstract "We show how to beat the `fundamental' noise limits in optical lithography using entangled quantum states. In this talk we will give the theoretical background to optical lithography and its quantum formulation. A proof-in-principle experimental demonstration is described." @default.
- W4234920674 created "2022-05-12" @default.
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- W4234920674 date "2003-05-16" @default.
- W4234920674 modified "2023-10-03" @default.
- W4234920674 title "Quantum lithography" @default.
- W4234920674 doi "https://doi.org/10.1117/12.497420" @default.
- W4234920674 hasPublicationYear "2003" @default.
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