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- W4235335932 abstract "The anomalously high rates observed in the early stages of silicon oxidation in dry O 2 at relatively low temperature ( T = 600–800 °C) are explained by assuming that these kinetics are controlled by the formation of a diffuse interface from the abrupt native interface. If this process is limited by O 2 diffusion in silicon, the available data allow the diffusivity to be determined. In particular, the activation energy for O 2 diffusion is estimated to be 1.7–1.8 eV." @default.
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- W4235335932 date "1996-01-01" @default.
- W4235335932 modified "2023-10-18" @default.
- W4235335932 title "Anomalous oxygen diffusivity and the early stages of silicon oxidation" @default.
- W4235335932 doi "https://doi.org/10.1016/b978-0-444-82413-4.50028-7" @default.
- W4235335932 hasPublicationYear "1996" @default.
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