Matches in SemOpenAlex for { <https://semopenalex.org/work/W4235437029> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W4235437029 abstract "Etching characteristics of (Pb,Sr)TiO3 (PST) thin films were investigated using inductively coupled chlorine-based plasma system as functions of gas-mixing ratio, radio frequency power and direct current bias voltage. It was found that increasing of Ar content in gas mixture lead to sufficient increasing of etch rate and selectivity of PST to Pt. The maximum etch rate of PST film is 56.2 nm/min and the selectivity of PST film to Pt is 0.8 at Cl2/(Cl2+Ar) of 20%. It was proposed that sputter etching is the dominant etching mechanism while the contribution of chemical reaction is relatively low due to low volatility of etching products." @default.
- W4235437029 created "2022-05-12" @default.
- W4235437029 creator A5086414030 @default.
- W4235437029 date "2003-11-06" @default.
- W4235437029 modified "2023-09-25" @default.
- W4235437029 title "(Pb,Sr)TiO3 thin films etching characteristics using inductively coupled plasma" @default.
- W4235437029 doi "https://doi.org/10.1016/s0040-6090(03)01271-9" @default.
- W4235437029 hasPublicationYear "2003" @default.
- W4235437029 type Work @default.
- W4235437029 citedByCount "0" @default.
- W4235437029 crossrefType "journal-article" @default.
- W4235437029 hasAuthorship W4235437029A5086414030 @default.
- W4235437029 hasConcept C100460472 @default.
- W4235437029 hasConcept C106159729 @default.
- W4235437029 hasConcept C107187091 @default.
- W4235437029 hasConcept C113196181 @default.
- W4235437029 hasConcept C118792377 @default.
- W4235437029 hasConcept C121332964 @default.
- W4235437029 hasConcept C161790260 @default.
- W4235437029 hasConcept C162324750 @default.
- W4235437029 hasConcept C171250308 @default.
- W4235437029 hasConcept C185592680 @default.
- W4235437029 hasConcept C19067145 @default.
- W4235437029 hasConcept C191897082 @default.
- W4235437029 hasConcept C192562407 @default.
- W4235437029 hasConcept C22423302 @default.
- W4235437029 hasConcept C2779227376 @default.
- W4235437029 hasConcept C43617362 @default.
- W4235437029 hasConcept C505241676 @default.
- W4235437029 hasConcept C55493867 @default.
- W4235437029 hasConcept C62520636 @default.
- W4235437029 hasConcept C82706917 @default.
- W4235437029 hasConcept C91602232 @default.
- W4235437029 hasConcept C95974651 @default.
- W4235437029 hasConceptScore W4235437029C100460472 @default.
- W4235437029 hasConceptScore W4235437029C106159729 @default.
- W4235437029 hasConceptScore W4235437029C107187091 @default.
- W4235437029 hasConceptScore W4235437029C113196181 @default.
- W4235437029 hasConceptScore W4235437029C118792377 @default.
- W4235437029 hasConceptScore W4235437029C121332964 @default.
- W4235437029 hasConceptScore W4235437029C161790260 @default.
- W4235437029 hasConceptScore W4235437029C162324750 @default.
- W4235437029 hasConceptScore W4235437029C171250308 @default.
- W4235437029 hasConceptScore W4235437029C185592680 @default.
- W4235437029 hasConceptScore W4235437029C19067145 @default.
- W4235437029 hasConceptScore W4235437029C191897082 @default.
- W4235437029 hasConceptScore W4235437029C192562407 @default.
- W4235437029 hasConceptScore W4235437029C22423302 @default.
- W4235437029 hasConceptScore W4235437029C2779227376 @default.
- W4235437029 hasConceptScore W4235437029C43617362 @default.
- W4235437029 hasConceptScore W4235437029C505241676 @default.
- W4235437029 hasConceptScore W4235437029C55493867 @default.
- W4235437029 hasConceptScore W4235437029C62520636 @default.
- W4235437029 hasConceptScore W4235437029C82706917 @default.
- W4235437029 hasConceptScore W4235437029C91602232 @default.
- W4235437029 hasConceptScore W4235437029C95974651 @default.
- W4235437029 hasLocation W42354370291 @default.
- W4235437029 hasOpenAccess W4235437029 @default.
- W4235437029 hasPrimaryLocation W42354370291 @default.
- W4235437029 hasRelatedWork W1544774047 @default.
- W4235437029 hasRelatedWork W2010599959 @default.
- W4235437029 hasRelatedWork W2022090380 @default.
- W4235437029 hasRelatedWork W2059112004 @default.
- W4235437029 hasRelatedWork W2060489104 @default.
- W4235437029 hasRelatedWork W2159260355 @default.
- W4235437029 hasRelatedWork W2354349380 @default.
- W4235437029 hasRelatedWork W2888863187 @default.
- W4235437029 hasRelatedWork W3049025642 @default.
- W4235437029 hasRelatedWork W4248928177 @default.
- W4235437029 isParatext "false" @default.
- W4235437029 isRetracted "false" @default.
- W4235437029 workType "article" @default.