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- W4236011269 abstract "This paper proposes a novel technique for fabricating microchannels in SU-8 by inserting optical-fibers as sacrificial moulds. The embedded circular microchannels, with inner diameters of 36, 80, and 125 μm (i.e., the diameters of optical-fibers), have been made successfully using a low-temperature fabrication process; where the SU-8 transparent negative-bone photo-resist is selected as the structure layer built in multilayers. Additionally, low-cost ultraviolet is applied as the exposure source to pattern the thin film photo-resist. Preliminary results show that the microchannels fabricated with the proposed technique have an average surface roughness (Ra) of the inner wall less than 10 nm and roundness deviation less than 7%. This paper also discusses the wetting behavior of the SU-8 surfaces before and after dipping in the hydrofluoric acid, and summarizes the relationship between the etching rate of sacrificial optical-fibers, etching temperature, concentration, and channel size. Finally, the etching rate of sacrificial optical-fibers vs. etching temperature subject to different concentrations and channel sizes is summarized and explained. This new fabrication technique of microchannel manufacture provides a new approach in selecting SU-8 for the structure material containing microchannels." @default.
- W4236011269 created "2022-05-12" @default.
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- W4236011269 date "2004-08-01" @default.
- W4236011269 modified "2023-09-27" @default.
- W4236011269 title "Fabrication of SU-8 embedded microchannels with circular cross-section" @default.
- W4236011269 doi "https://doi.org/10.1016/s0890-6955(04)00052-5" @default.
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