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- W4236029899 abstract "This paper reports the effect of the number of dissolution inhibiting groups added to resist components on the dissolution characteristics and surface morphology of a resist, and discusses the relationship between the exposure dose and surface roughness quantitatively evaluated by atomic force microscopy (AFM)." @default.
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- W4236029899 date "1998-01-01" @default.
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- W4236029899 title "Dissolution Characteristics And Surface Morphology Of Chemically Amplified Positive Resists In X-Ray Lithography" @default.
- W4236029899 doi "https://doi.org/10.1109/imnc.1998.729926" @default.
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