Matches in SemOpenAlex for { <https://semopenalex.org/work/W4236647587> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W4236647587 endingPage "143" @default.
- W4236647587 startingPage "143" @default.
- W4236647587 abstract "Microelectromechanical systems (MEMS) capacitive switches discussed in this paper employ electrostatic actuation to perform switching. Capacitive switches employ inductive tuning for excellent switching characteristics in X and Ku bands. Employing inductive tuning is found to increase the switch beam inductance by a few tens of pico-henry. This enhances the Q factor and enables tuning of isolation over a narrow band of frequencies. Beam inductance can be extracted from the simulated isolation characteristics of the switch by curve fitting. This paper presents design, fabrication and characterisation of inductive tuned MEMS capacitive switches tuned for X and Ku bands. The devices are fabricated on high resistive (10 KΩ) silicon substrate by a five mask process. The characterisation of the fabricated devices are conducted using Cascade probe station and high frequency Power network analyser. Characterisation results show an actuation voltage of 18.5 volts. The insertion - loss and isolation are better than 0.5 dB and -40 dB respectively in the 8-18 GHz band." @default.
- W4236647587 created "2022-05-12" @default.
- W4236647587 creator A5006281428 @default.
- W4236647587 creator A5025329189 @default.
- W4236647587 date "2018-01-01" @default.
- W4236647587 modified "2023-10-14" @default.
- W4236647587 title "Fabrication and characterisation of RF MEMS capacitive switches tuned for X and Ku bands" @default.
- W4236647587 doi "https://doi.org/10.1504/ijma.2018.094491" @default.
- W4236647587 hasPublicationYear "2018" @default.
- W4236647587 type Work @default.
- W4236647587 citedByCount "0" @default.
- W4236647587 crossrefType "journal-article" @default.
- W4236647587 hasAuthorship W4236647587A5006281428 @default.
- W4236647587 hasAuthorship W4236647587A5025329189 @default.
- W4236647587 hasConcept C119599485 @default.
- W4236647587 hasConcept C127413603 @default.
- W4236647587 hasConcept C136525101 @default.
- W4236647587 hasConcept C142724271 @default.
- W4236647587 hasConcept C165801399 @default.
- W4236647587 hasConcept C192562407 @default.
- W4236647587 hasConcept C204787440 @default.
- W4236647587 hasConcept C206755178 @default.
- W4236647587 hasConcept C29210110 @default.
- W4236647587 hasConcept C37977207 @default.
- W4236647587 hasConcept C49040817 @default.
- W4236647587 hasConcept C52192207 @default.
- W4236647587 hasConcept C6899612 @default.
- W4236647587 hasConcept C71924100 @default.
- W4236647587 hasConcept C90327742 @default.
- W4236647587 hasConceptScore W4236647587C119599485 @default.
- W4236647587 hasConceptScore W4236647587C127413603 @default.
- W4236647587 hasConceptScore W4236647587C136525101 @default.
- W4236647587 hasConceptScore W4236647587C142724271 @default.
- W4236647587 hasConceptScore W4236647587C165801399 @default.
- W4236647587 hasConceptScore W4236647587C192562407 @default.
- W4236647587 hasConceptScore W4236647587C204787440 @default.
- W4236647587 hasConceptScore W4236647587C206755178 @default.
- W4236647587 hasConceptScore W4236647587C29210110 @default.
- W4236647587 hasConceptScore W4236647587C37977207 @default.
- W4236647587 hasConceptScore W4236647587C49040817 @default.
- W4236647587 hasConceptScore W4236647587C52192207 @default.
- W4236647587 hasConceptScore W4236647587C6899612 @default.
- W4236647587 hasConceptScore W4236647587C71924100 @default.
- W4236647587 hasConceptScore W4236647587C90327742 @default.
- W4236647587 hasIssue "2/3" @default.
- W4236647587 hasLocation W42366475871 @default.
- W4236647587 hasOpenAccess W4236647587 @default.
- W4236647587 hasPrimaryLocation W42366475871 @default.
- W4236647587 hasRelatedWork W1553337512 @default.
- W4236647587 hasRelatedWork W1920431341 @default.
- W4236647587 hasRelatedWork W2044942002 @default.
- W4236647587 hasRelatedWork W2063405566 @default.
- W4236647587 hasRelatedWork W2094287917 @default.
- W4236647587 hasRelatedWork W2103799644 @default.
- W4236647587 hasRelatedWork W2110663304 @default.
- W4236647587 hasRelatedWork W2898754620 @default.
- W4236647587 hasRelatedWork W2905015951 @default.
- W4236647587 hasRelatedWork W4251646950 @default.
- W4236647587 hasVolume "6" @default.
- W4236647587 isParatext "false" @default.
- W4236647587 isRetracted "false" @default.
- W4236647587 workType "article" @default.