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- W4238020002 endingPage "598" @default.
- W4238020002 startingPage "594" @default.
- W4238020002 abstract "A new method is proposed for fabricating silicon nanowires (SiNWs) on silicon substrates instead of on SOI wafers, providing a cheaper process; it also enables their electrical properties to be measured easily. Using scanning probe lithography, mask patterns for SiNWs were defined on a (1 1 0)-oriented bare silicon wafer. Subsequently silicon nitride spacers were produced and utilized to protect SiNWs during a dry-oxidation process, which was applied to isolate the SiNWs from the substrate. The field induced oxide mask patterns generated with a scanning probe microscope were around 50–60 nm in width, and SiNWs with 34 nm in width and 160 nm in height resulted after wet potassium hydroxide (KOH) orientation-dependent etching at 40° for 400 s. SiNWs with line width around 34 nm on the bare silicon wafer were achieved with the scanning probe lithography process and conventional IC processing." @default.
- W4238020002 created "2022-05-12" @default.
- W4238020002 creator A5043909745 @default.
- W4238020002 date "2004-06-01" @default.
- W4238020002 modified "2023-10-16" @default.
- W4238020002 title "A new fabrication technique for silicon nanowires" @default.
- W4238020002 doi "https://doi.org/10.1016/s0167-9317(04)00149-2" @default.
- W4238020002 hasPublicationYear "2004" @default.
- W4238020002 type Work @default.
- W4238020002 citedByCount "3" @default.
- W4238020002 crossrefType "journal-article" @default.
- W4238020002 hasAuthorship W4238020002A5043909745 @default.
- W4238020002 hasConcept C100460472 @default.
- W4238020002 hasConcept C111368507 @default.
- W4238020002 hasConcept C127313418 @default.
- W4238020002 hasConcept C1291036 @default.
- W4238020002 hasConcept C136525101 @default.
- W4238020002 hasConcept C142724271 @default.
- W4238020002 hasConcept C159985019 @default.
- W4238020002 hasConcept C160671074 @default.
- W4238020002 hasConcept C171250308 @default.
- W4238020002 hasConcept C178790620 @default.
- W4238020002 hasConcept C185592680 @default.
- W4238020002 hasConcept C192562407 @default.
- W4238020002 hasConcept C204223013 @default.
- W4238020002 hasConcept C204787440 @default.
- W4238020002 hasConcept C26771246 @default.
- W4238020002 hasConcept C2777289219 @default.
- W4238020002 hasConcept C2777431650 @default.
- W4238020002 hasConcept C2779227376 @default.
- W4238020002 hasConcept C2779439175 @default.
- W4238020002 hasConcept C49040817 @default.
- W4238020002 hasConcept C53143962 @default.
- W4238020002 hasConcept C544956773 @default.
- W4238020002 hasConcept C71924100 @default.
- W4238020002 hasConceptScore W4238020002C100460472 @default.
- W4238020002 hasConceptScore W4238020002C111368507 @default.
- W4238020002 hasConceptScore W4238020002C127313418 @default.
- W4238020002 hasConceptScore W4238020002C1291036 @default.
- W4238020002 hasConceptScore W4238020002C136525101 @default.
- W4238020002 hasConceptScore W4238020002C142724271 @default.
- W4238020002 hasConceptScore W4238020002C159985019 @default.
- W4238020002 hasConceptScore W4238020002C160671074 @default.
- W4238020002 hasConceptScore W4238020002C171250308 @default.
- W4238020002 hasConceptScore W4238020002C178790620 @default.
- W4238020002 hasConceptScore W4238020002C185592680 @default.
- W4238020002 hasConceptScore W4238020002C192562407 @default.
- W4238020002 hasConceptScore W4238020002C204223013 @default.
- W4238020002 hasConceptScore W4238020002C204787440 @default.
- W4238020002 hasConceptScore W4238020002C26771246 @default.
- W4238020002 hasConceptScore W4238020002C2777289219 @default.
- W4238020002 hasConceptScore W4238020002C2777431650 @default.
- W4238020002 hasConceptScore W4238020002C2779227376 @default.
- W4238020002 hasConceptScore W4238020002C2779439175 @default.
- W4238020002 hasConceptScore W4238020002C49040817 @default.
- W4238020002 hasConceptScore W4238020002C53143962 @default.
- W4238020002 hasConceptScore W4238020002C544956773 @default.
- W4238020002 hasConceptScore W4238020002C71924100 @default.
- W4238020002 hasLocation W42380200021 @default.
- W4238020002 hasOpenAccess W4238020002 @default.
- W4238020002 hasPrimaryLocation W42380200021 @default.
- W4238020002 hasRelatedWork W1967579400 @default.
- W4238020002 hasRelatedWork W1968581245 @default.
- W4238020002 hasRelatedWork W2013557620 @default.
- W4238020002 hasRelatedWork W2046305690 @default.
- W4238020002 hasRelatedWork W2046532889 @default.
- W4238020002 hasRelatedWork W2049708184 @default.
- W4238020002 hasRelatedWork W2082031831 @default.
- W4238020002 hasRelatedWork W2162783441 @default.
- W4238020002 hasRelatedWork W2936391993 @default.
- W4238020002 hasRelatedWork W3088422388 @default.
- W4238020002 hasVolume "73-74" @default.
- W4238020002 isParatext "false" @default.
- W4238020002 isRetracted "false" @default.
- W4238020002 workType "article" @default.