Matches in SemOpenAlex for { <https://semopenalex.org/work/W4238162010> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W4238162010 abstract "Abstract This work proposed a modified plasma induced charging recorder to widen detection range, for monitoring the possible plasma damage across a wafer during advanced CMOS BEOL processes. New antenna designs for plasma induced damage patterns with extended capacitance are investigated. By adapting the novel PID recorders, maximum charging levels of the detectors have been enhanced." @default.
- W4238162010 created "2022-05-12" @default.
- W4238162010 creator A5005358949 @default.
- W4238162010 creator A5025453923 @default.
- W4238162010 creator A5060138369 @default.
- W4238162010 creator A5060454756 @default.
- W4238162010 creator A5085948014 @default.
- W4238162010 date "2020-12-15" @default.
- W4238162010 modified "2023-10-18" @default.
- W4238162010 title "Wide Range Detector of Plasma Induced Charging Effect for Advanced CMOS BEOL Processes" @default.
- W4238162010 doi "https://doi.org/10.21203/rs.3.rs-125065/v1" @default.
- W4238162010 hasPublicationYear "2020" @default.
- W4238162010 type Work @default.
- W4238162010 citedByCount "0" @default.
- W4238162010 crossrefType "posted-content" @default.
- W4238162010 hasAuthorship W4238162010A5005358949 @default.
- W4238162010 hasAuthorship W4238162010A5025453923 @default.
- W4238162010 hasAuthorship W4238162010A5060138369 @default.
- W4238162010 hasAuthorship W4238162010A5060454756 @default.
- W4238162010 hasAuthorship W4238162010A5085948014 @default.
- W4238162010 hasBestOaLocation W42381620101 @default.
- W4238162010 hasConcept C119599485 @default.
- W4238162010 hasConcept C121332964 @default.
- W4238162010 hasConcept C127413603 @default.
- W4238162010 hasConcept C159985019 @default.
- W4238162010 hasConcept C160671074 @default.
- W4238162010 hasConcept C17525397 @default.
- W4238162010 hasConcept C192562407 @default.
- W4238162010 hasConcept C204323151 @default.
- W4238162010 hasConcept C24326235 @default.
- W4238162010 hasConcept C30066665 @default.
- W4238162010 hasConcept C46362747 @default.
- W4238162010 hasConcept C49040817 @default.
- W4238162010 hasConcept C62520636 @default.
- W4238162010 hasConcept C82706917 @default.
- W4238162010 hasConcept C94915269 @default.
- W4238162010 hasConceptScore W4238162010C119599485 @default.
- W4238162010 hasConceptScore W4238162010C121332964 @default.
- W4238162010 hasConceptScore W4238162010C127413603 @default.
- W4238162010 hasConceptScore W4238162010C159985019 @default.
- W4238162010 hasConceptScore W4238162010C160671074 @default.
- W4238162010 hasConceptScore W4238162010C17525397 @default.
- W4238162010 hasConceptScore W4238162010C192562407 @default.
- W4238162010 hasConceptScore W4238162010C204323151 @default.
- W4238162010 hasConceptScore W4238162010C24326235 @default.
- W4238162010 hasConceptScore W4238162010C30066665 @default.
- W4238162010 hasConceptScore W4238162010C46362747 @default.
- W4238162010 hasConceptScore W4238162010C49040817 @default.
- W4238162010 hasConceptScore W4238162010C62520636 @default.
- W4238162010 hasConceptScore W4238162010C82706917 @default.
- W4238162010 hasConceptScore W4238162010C94915269 @default.
- W4238162010 hasLocation W42381620101 @default.
- W4238162010 hasOpenAccess W4238162010 @default.
- W4238162010 hasPrimaryLocation W42381620101 @default.
- W4238162010 hasRelatedWork W1564420392 @default.
- W4238162010 hasRelatedWork W1580975125 @default.
- W4238162010 hasRelatedWork W1970914845 @default.
- W4238162010 hasRelatedWork W2049017294 @default.
- W4238162010 hasRelatedWork W2071524226 @default.
- W4238162010 hasRelatedWork W2077597155 @default.
- W4238162010 hasRelatedWork W2108553032 @default.
- W4238162010 hasRelatedWork W2120218076 @default.
- W4238162010 hasRelatedWork W2133389615 @default.
- W4238162010 hasRelatedWork W2145015417 @default.
- W4238162010 isParatext "false" @default.
- W4238162010 isRetracted "false" @default.
- W4238162010 workType "article" @default.