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• W4238238417 abstract "The Monte Carlo method is a convenient starting point for discussing electron beam-specimen interactions. Monte Carlo simulations are capable of simultaneously accounting for all electron interactions, elastic as well as inelastic, within a solid in a computationally tractable manner and produces results that are consistent with experiment. This chapter introduces the physics of elastic and inelastic scattering and describes their implementation in a Monte Carlo model. It discusses some applications of Monte Carlo simulations in electron microscopy, and outlines further advanced topics, such as the quantum mechanical description of scattering. Typically, elastic scattering is simulated using the screened Rutherford cross-section, while the Bethe continuous energy loss stopping power is used for inelastic scattering. Monte Carlo methods can be applied to a variety of problems, such as backscattered, secondary electron and X-ray generation as well as cathodoluminescence (CL), electron beam induced current (EBIC) microscopies." @default.
• W4238238417 created "2022-05-12" @default.
• W4238238417 date "2018-04-16" @default.
• W4238238417 modified "2023-09-26" @default.
• W4238238417 title "The Monte Carlo Method" @default.
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• W4238238417 doi "https://doi.org/10.1002/9781118696545.ch2" @default.
• W4238238417 hasPublicationYear "2018" @default.
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