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- W4238553373 abstract "Spectroscopic ellipsometry can provide information non-destructively on layer thickness, composition, refractive index, crystallinity and surface/interface roughness. This article discusses its use for ex situ/in-line monitoring and in situ/real-time control. Examples are given based on silicon epitaxial surfaces, GaN nucleation layers, SiGe/Si and other multilayer structures. Real-time data analysis methods are discussed and in situ spectroscopic ellipsometry is shown to provide insights into surface effects during SiGe epitaxial growth. © Crown Copyright 2001. Published by John Wiley & Sons, Ltd." @default.
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- W4238553373 date "2001-10-01" @default.
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- W4238553373 title "Spectroscopic ellipsometry for monitoring and control of surfaces, thin layers and interfaces" @default.
- W4238553373 doi "https://doi.org/10.1002/sia.1130.abs" @default.
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