Matches in SemOpenAlex for { <https://semopenalex.org/work/W4239086221> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W4239086221 abstract "New hybrid plasma sources for both low gas pressure processing (below 1 Pa) and for generation of cold atmospheric plasma are introduced. The sources combine advantages of the microwave plasma with the hollow cathode plasma in a common system. The low-pressure hybrid plasma source (HYP LP) combines the ECR (electron cyclotron resonance) plasma inside microwave radiator and the radio frequency (RF) hollow cathode plasma generated by linear magnetized hollow cathode at the outlet of the radiator. The plasmas are coupled together in a common magnetic field facilitating both the hollow cathode plasma and the ECR absorption of the microwave power in the vicinity of the cathode outlet. The plasma density 15 cm below the source outlet reaches 6×1011 cm−3 at 1 kW incident power from both generators and argon pressure of 0.8 Pa. This classifies the HYP LP source as a high-density plasma source. The TiN film deposition rate of approximately 150 nm/min was achieved in the reactive PVD of highly (111) textured TiN films. The atmospheric pressure hybrid plasma source (HYP AP) combines a microwave antenna and a RF hollow cathode in a common electrode. The source is able to produce long atmospheric plasma plumes and to control plasma parameters efficiently. The HYP sources have a full ambition to become new powerful processing tools on the market." @default.
- W4239086221 created "2022-05-12" @default.
- W4239086221 creator A5037527063 @default.
- W4239086221 date "2003-10-03" @default.
- W4239086221 modified "2023-09-25" @default.
- W4239086221 title "New microwave and hollow cathode hybrid plasma sources" @default.
- W4239086221 doi "https://doi.org/10.1016/s0257-8972(03)00890-9" @default.
- W4239086221 hasPublicationYear "2003" @default.
- W4239086221 type Work @default.
- W4239086221 citedByCount "0" @default.
- W4239086221 crossrefType "journal-article" @default.
- W4239086221 hasAuthorship W4239086221A5037527063 @default.
- W4239086221 hasConcept C113196181 @default.
- W4239086221 hasConcept C119599485 @default.
- W4239086221 hasConcept C121332964 @default.
- W4239086221 hasConcept C127413603 @default.
- W4239086221 hasConcept C145738678 @default.
- W4239086221 hasConcept C153294291 @default.
- W4239086221 hasConcept C184779094 @default.
- W4239086221 hasConcept C185592680 @default.
- W4239086221 hasConcept C192039680 @default.
- W4239086221 hasConcept C192562407 @default.
- W4239086221 hasConcept C200239111 @default.
- W4239086221 hasConcept C43617362 @default.
- W4239086221 hasConcept C44838205 @default.
- W4239086221 hasConcept C49040817 @default.
- W4239086221 hasConcept C49110097 @default.
- W4239086221 hasConcept C547737533 @default.
- W4239086221 hasConcept C60581705 @default.
- W4239086221 hasConcept C62520636 @default.
- W4239086221 hasConcept C82706917 @default.
- W4239086221 hasConcept C85344455 @default.
- W4239086221 hasConcept C95974651 @default.
- W4239086221 hasConceptScore W4239086221C113196181 @default.
- W4239086221 hasConceptScore W4239086221C119599485 @default.
- W4239086221 hasConceptScore W4239086221C121332964 @default.
- W4239086221 hasConceptScore W4239086221C127413603 @default.
- W4239086221 hasConceptScore W4239086221C145738678 @default.
- W4239086221 hasConceptScore W4239086221C153294291 @default.
- W4239086221 hasConceptScore W4239086221C184779094 @default.
- W4239086221 hasConceptScore W4239086221C185592680 @default.
- W4239086221 hasConceptScore W4239086221C192039680 @default.
- W4239086221 hasConceptScore W4239086221C192562407 @default.
- W4239086221 hasConceptScore W4239086221C200239111 @default.
- W4239086221 hasConceptScore W4239086221C43617362 @default.
- W4239086221 hasConceptScore W4239086221C44838205 @default.
- W4239086221 hasConceptScore W4239086221C49040817 @default.
- W4239086221 hasConceptScore W4239086221C49110097 @default.
- W4239086221 hasConceptScore W4239086221C547737533 @default.
- W4239086221 hasConceptScore W4239086221C60581705 @default.
- W4239086221 hasConceptScore W4239086221C62520636 @default.
- W4239086221 hasConceptScore W4239086221C82706917 @default.
- W4239086221 hasConceptScore W4239086221C85344455 @default.
- W4239086221 hasConceptScore W4239086221C95974651 @default.
- W4239086221 hasLocation W42390862211 @default.
- W4239086221 hasOpenAccess W4239086221 @default.
- W4239086221 hasPrimaryLocation W42390862211 @default.
- W4239086221 hasRelatedWork W2002665247 @default.
- W4239086221 hasRelatedWork W2017747239 @default.
- W4239086221 hasRelatedWork W2025173452 @default.
- W4239086221 hasRelatedWork W2075869476 @default.
- W4239086221 hasRelatedWork W2738063522 @default.
- W4239086221 hasRelatedWork W2739322865 @default.
- W4239086221 hasRelatedWork W2899477184 @default.
- W4239086221 hasRelatedWork W4206575104 @default.
- W4239086221 hasRelatedWork W572774102 @default.
- W4239086221 hasRelatedWork W2122858819 @default.
- W4239086221 isParatext "false" @default.
- W4239086221 isRetracted "false" @default.
- W4239086221 workType "article" @default.