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- W4239722571 endingPage "05EA08" @default.
- W4239722571 startingPage "05EA08" @default.
- W4239722571 abstract "Bilayers of Ru (7 nm)/WNx (8 nm) prepared by sputtering were investigated as diffusion barriers between Cu and Si, and their performances were compared as a function of N2 flow rate during the deposition of WNx. The Ru/WNx bilayer diffusion barriers were stable upon annealing at up to at least 650 °C for 30 min while a Ru single layer (15 nm in thickness) failed after annealing at 450 °C owing to the formation of Cu silicide. Grazing-angle X-ray diffractometry results showed that the crystallinity of the WNx film was degraded but that its nanocrystalline state preserved upon annealing at higher temperatures with increasing N2 flow rate during the deposition. These resulted in the better performance against Cu attack of bilayer diffusion barriers with the WNx film prepared with a higher N2 flow rate." @default.
- W4239722571 created "2022-05-12" @default.
- W4239722571 creator A5038067008 @default.
- W4239722571 creator A5043152039 @default.
- W4239722571 creator A5076843245 @default.
- W4239722571 creator A5091671206 @default.
- W4239722571 date "2011-05-01" @default.
- W4239722571 modified "2023-09-27" @default.
- W4239722571 title "Ru/WNxBilayers as Diffusion Barriers for Cu Interconnects" @default.
- W4239722571 cites W1608170468 @default.
- W4239722571 cites W1980785292 @default.
- W4239722571 cites W1980996074 @default.
- W4239722571 cites W1981434648 @default.
- W4239722571 cites W1982051391 @default.
- W4239722571 cites W2004284198 @default.
- W4239722571 cites W2020192844 @default.
- W4239722571 cites W2026425201 @default.
- W4239722571 cites W2054908898 @default.
- W4239722571 cites W2055459990 @default.
- W4239722571 cites W2063305182 @default.
- W4239722571 cites W2073839866 @default.
- W4239722571 cites W2086160880 @default.
- W4239722571 cites W2091572568 @default.
- W4239722571 cites W2153761808 @default.
- W4239722571 cites W2157210040 @default.
- W4239722571 doi "https://doi.org/10.7567/jjap.50.05ea08" @default.
- W4239722571 hasPublicationYear "2011" @default.
- W4239722571 type Work @default.
- W4239722571 citedByCount "0" @default.
- W4239722571 crossrefType "journal-article" @default.
- W4239722571 hasAuthorship W4239722571A5038067008 @default.
- W4239722571 hasAuthorship W4239722571A5043152039 @default.
- W4239722571 hasAuthorship W4239722571A5076843245 @default.
- W4239722571 hasAuthorship W4239722571A5091671206 @default.
- W4239722571 hasConcept C113196181 @default.
- W4239722571 hasConcept C140676511 @default.
- W4239722571 hasConcept C159985019 @default.
- W4239722571 hasConcept C171250308 @default.
- W4239722571 hasConcept C185592680 @default.
- W4239722571 hasConcept C19067145 @default.
- W4239722571 hasConcept C192157962 @default.
- W4239722571 hasConcept C192562407 @default.
- W4239722571 hasConcept C22423302 @default.
- W4239722571 hasConcept C2777855556 @default.
- W4239722571 hasConcept C2778836790 @default.
- W4239722571 hasConcept C2779227376 @default.
- W4239722571 hasConcept C2780901251 @default.
- W4239722571 hasConcept C41625074 @default.
- W4239722571 hasConcept C43617362 @default.
- W4239722571 hasConcept C46275449 @default.
- W4239722571 hasConcept C55493867 @default.
- W4239722571 hasConceptScore W4239722571C113196181 @default.
- W4239722571 hasConceptScore W4239722571C140676511 @default.
- W4239722571 hasConceptScore W4239722571C159985019 @default.
- W4239722571 hasConceptScore W4239722571C171250308 @default.
- W4239722571 hasConceptScore W4239722571C185592680 @default.
- W4239722571 hasConceptScore W4239722571C19067145 @default.
- W4239722571 hasConceptScore W4239722571C192157962 @default.
- W4239722571 hasConceptScore W4239722571C192562407 @default.
- W4239722571 hasConceptScore W4239722571C22423302 @default.
- W4239722571 hasConceptScore W4239722571C2777855556 @default.
- W4239722571 hasConceptScore W4239722571C2778836790 @default.
- W4239722571 hasConceptScore W4239722571C2779227376 @default.
- W4239722571 hasConceptScore W4239722571C2780901251 @default.
- W4239722571 hasConceptScore W4239722571C41625074 @default.
- W4239722571 hasConceptScore W4239722571C43617362 @default.
- W4239722571 hasConceptScore W4239722571C46275449 @default.
- W4239722571 hasConceptScore W4239722571C55493867 @default.
- W4239722571 hasIssue "5S1" @default.
- W4239722571 hasLocation W42397225711 @default.
- W4239722571 hasOpenAccess W4239722571 @default.
- W4239722571 hasPrimaryLocation W42397225711 @default.
- W4239722571 hasRelatedWork W1999264890 @default.
- W4239722571 hasRelatedWork W2025974323 @default.
- W4239722571 hasRelatedWork W2028247303 @default.
- W4239722571 hasRelatedWork W2057502003 @default.
- W4239722571 hasRelatedWork W2105765658 @default.
- W4239722571 hasRelatedWork W2513078460 @default.
- W4239722571 hasRelatedWork W3045256457 @default.
- W4239722571 hasRelatedWork W4242522468 @default.
- W4239722571 hasRelatedWork W4245020567 @default.
- W4239722571 hasRelatedWork W4307901390 @default.
- W4239722571 hasVolume "50" @default.
- W4239722571 isParatext "false" @default.
- W4239722571 isRetracted "false" @default.
- W4239722571 workType "article" @default.