Matches in SemOpenAlex for { <https://semopenalex.org/work/W4239830762> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W4239830762 endingPage "610" @default.
- W4239830762 startingPage "605" @default.
- W4239830762 abstract "This contribution is intended to review the international state of the art in process modeling with particular emphasis on doping. Representative results for ion implantation into two-and three-dimensional structures are presented. Redistribution of dopants, interstitials and vacancies with fully coupled models are discussed. Local oxidation simulations of LOCOS structures and trench sidewalls demonstrate the inherent power of process simulation. Some remarks on the computational requirements are given." @default.
- W4239830762 created "2022-05-12" @default.
- W4239830762 creator A5043510129 @default.
- W4239830762 date "1989-05-01" @default.
- W4239830762 modified "2023-09-25" @default.
- W4239830762 title "Process modeling" @default.
- W4239830762 doi "https://doi.org/10.1016/0167-9317(89)90129-9" @default.
- W4239830762 hasPublicationYear "1989" @default.
- W4239830762 type Work @default.
- W4239830762 citedByCount "1" @default.
- W4239830762 crossrefType "journal-article" @default.
- W4239830762 hasAuthorship W4239830762A5043510129 @default.
- W4239830762 hasConcept C111919701 @default.
- W4239830762 hasConcept C115952470 @default.
- W4239830762 hasConcept C127413603 @default.
- W4239830762 hasConcept C155310634 @default.
- W4239830762 hasConcept C171250308 @default.
- W4239830762 hasConcept C17744445 @default.
- W4239830762 hasConcept C191952053 @default.
- W4239830762 hasConcept C192562407 @default.
- W4239830762 hasConcept C195114451 @default.
- W4239830762 hasConcept C199539241 @default.
- W4239830762 hasConcept C2777431650 @default.
- W4239830762 hasConcept C2779227376 @default.
- W4239830762 hasConcept C41008148 @default.
- W4239830762 hasConcept C42360764 @default.
- W4239830762 hasConcept C49040817 @default.
- W4239830762 hasConcept C544956773 @default.
- W4239830762 hasConcept C57863236 @default.
- W4239830762 hasConcept C61696701 @default.
- W4239830762 hasConcept C74080474 @default.
- W4239830762 hasConcept C76956256 @default.
- W4239830762 hasConcept C94625758 @default.
- W4239830762 hasConcept C98045186 @default.
- W4239830762 hasConceptScore W4239830762C111919701 @default.
- W4239830762 hasConceptScore W4239830762C115952470 @default.
- W4239830762 hasConceptScore W4239830762C127413603 @default.
- W4239830762 hasConceptScore W4239830762C155310634 @default.
- W4239830762 hasConceptScore W4239830762C171250308 @default.
- W4239830762 hasConceptScore W4239830762C17744445 @default.
- W4239830762 hasConceptScore W4239830762C191952053 @default.
- W4239830762 hasConceptScore W4239830762C192562407 @default.
- W4239830762 hasConceptScore W4239830762C195114451 @default.
- W4239830762 hasConceptScore W4239830762C199539241 @default.
- W4239830762 hasConceptScore W4239830762C2777431650 @default.
- W4239830762 hasConceptScore W4239830762C2779227376 @default.
- W4239830762 hasConceptScore W4239830762C41008148 @default.
- W4239830762 hasConceptScore W4239830762C42360764 @default.
- W4239830762 hasConceptScore W4239830762C49040817 @default.
- W4239830762 hasConceptScore W4239830762C544956773 @default.
- W4239830762 hasConceptScore W4239830762C57863236 @default.
- W4239830762 hasConceptScore W4239830762C61696701 @default.
- W4239830762 hasConceptScore W4239830762C74080474 @default.
- W4239830762 hasConceptScore W4239830762C76956256 @default.
- W4239830762 hasConceptScore W4239830762C94625758 @default.
- W4239830762 hasConceptScore W4239830762C98045186 @default.
- W4239830762 hasIssue "1-4" @default.
- W4239830762 hasLocation W42398307621 @default.
- W4239830762 hasOpenAccess W4239830762 @default.
- W4239830762 hasPrimaryLocation W42398307621 @default.
- W4239830762 hasRelatedWork W1981011275 @default.
- W4239830762 hasRelatedWork W1996900782 @default.
- W4239830762 hasRelatedWork W2109982910 @default.
- W4239830762 hasRelatedWork W2156779088 @default.
- W4239830762 hasRelatedWork W2468192136 @default.
- W4239830762 hasRelatedWork W2899084033 @default.
- W4239830762 hasRelatedWork W3002793035 @default.
- W4239830762 hasRelatedWork W3045899165 @default.
- W4239830762 hasRelatedWork W3173404886 @default.
- W4239830762 hasRelatedWork W4383599250 @default.
- W4239830762 hasVolume "9" @default.
- W4239830762 isParatext "false" @default.
- W4239830762 isRetracted "false" @default.
- W4239830762 workType "article" @default.