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- W4240786105 abstract "The Hydrogenated amorphous carbon(a-C:H) thin films are deposited on silicon with a close field unbalanced magnetron(CFUBM) sputtering systems. The experimental data are obtained on the depositon rate and physical properties of a-C:H films using DC bias voltage and Ar/C<TEX>$_2$</TEX>H<TEX>$_2$</TEX> pressure. The depostion rate and the surface roughness decrease with DC bias voltage, but the hardness of the thin films increases with DC bias voltage. And the position of G-peak moves to lower wavenumber indicating an increase in diamond-like carbon characteristics with the lower Ar/C<TEX>$_2$</TEX>H<TEX>$_2$</TEX> pressure." @default.
- W4240786105 created "2022-05-12" @default.
- W4240786105 date "2004-03-01" @default.
- W4240786105 modified "2023-09-30" @default.
- W4240786105 title "Characteristics of Hydrogenated Amorphous Carbon (a-C:H) Thin Films Grown by Close Field UnBalanced Magnetron Sputtering Method" @default.
- W4240786105 doi "https://doi.org/10.4313/jkem.2004.17.3.278" @default.
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