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- W4240985893 abstract "A technique is described for preparing Si/SiO2 thin multilayers by performing sputtering from two independent sources in argon–hydrogen mixtures. Structural studies carried out by x-ray diffraction and Auger electron spectroscopy indicate a well-defined multilayer structure. The x-ray reflection peaks of the Si/SiO2 multilayer structure are found to intensify as a result of (i) inclusion of hydrogen in the sputtering gas and (ii) lowering of the sputtering pressure. Studies of the infrared spectra reveal that samples produced by sputtering in argon–hydrogen mixtures have absorption bands at ∼880 and 630 cm−1." @default.
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- W4240985893 date "1989-03-01" @default.
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- W4240985893 title "Structure of Si/SiO2 thin multilayers sputtered in argon–hydrogen mixtures" @default.
- W4240985893 doi "https://doi.org/10.1116/1.575745" @default.
- W4240985893 hasPublicationYear "1989" @default.
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