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- W4241342687 abstract "A Monte Carlo routine was developed to simulate the motion and energetics of ions in the pores of a xerogel material under plasma etching conditions. The simulation included the effects of an applied electric field and input conditions for the pore as a function of pressure and applied voltage in the plasma reactor. We were interested in the ion energy in a pore, the ion penetration depth and the effect of ion energy on etching. At low pressures the nanoporous material etches faster than dense silicon dioxide. This is to be expected given the decrease in density and increase in surface area that arises due to the porosity. However, as the pressure is increased, the etch rate decreases dramatically and, eventually, the dense oxide may etch faster than the porous material. CHF3 was used as the etchant gas and, for this gas, we believe this behavior to be controlled by the ion energy and energy transport in the pores of the xerogel material. As the pressure in the plasma reactor is increased, the incoming ions switch over from etching activation to polymerisation activation. This agrees with the observed crossover in etch rate seen experimentally and with the cessation in etching as pressure is increased. The switch is affected by pore roughness and correlates with the average ion energy in the pore." @default.
- W4241342687 created "2022-05-12" @default.
- W4241342687 creator A5023203808 @default.
- W4241342687 date "2004-05-01" @default.
- W4241342687 modified "2023-09-25" @default.
- W4241342687 title "Energy transport in plasma etching of nanoporous dielectric materials" @default.
- W4241342687 doi "https://doi.org/10.1016/s0749-6036(04)00104-1" @default.
- W4241342687 hasPublicationYear "2004" @default.
- W4241342687 type Work @default.
- W4241342687 citedByCount "0" @default.
- W4241342687 crossrefType "journal-article" @default.
- W4241342687 hasAuthorship W4241342687A5023203808 @default.
- W4241342687 hasConcept C100460472 @default.
- W4241342687 hasConcept C107187091 @default.
- W4241342687 hasConcept C121332964 @default.
- W4241342687 hasConcept C130472188 @default.
- W4241342687 hasConcept C133386390 @default.
- W4241342687 hasConcept C145148216 @default.
- W4241342687 hasConcept C159985019 @default.
- W4241342687 hasConcept C171250308 @default.
- W4241342687 hasConcept C178790620 @default.
- W4241342687 hasConcept C185592680 @default.
- W4241342687 hasConcept C192562407 @default.
- W4241342687 hasConcept C2779227376 @default.
- W4241342687 hasConcept C48940184 @default.
- W4241342687 hasConcept C49040817 @default.
- W4241342687 hasConcept C62520636 @default.
- W4241342687 hasConcept C6648577 @default.
- W4241342687 hasConcept C82706917 @default.
- W4241342687 hasConceptScore W4241342687C100460472 @default.
- W4241342687 hasConceptScore W4241342687C107187091 @default.
- W4241342687 hasConceptScore W4241342687C121332964 @default.
- W4241342687 hasConceptScore W4241342687C130472188 @default.
- W4241342687 hasConceptScore W4241342687C133386390 @default.
- W4241342687 hasConceptScore W4241342687C145148216 @default.
- W4241342687 hasConceptScore W4241342687C159985019 @default.
- W4241342687 hasConceptScore W4241342687C171250308 @default.
- W4241342687 hasConceptScore W4241342687C178790620 @default.
- W4241342687 hasConceptScore W4241342687C185592680 @default.
- W4241342687 hasConceptScore W4241342687C192562407 @default.
- W4241342687 hasConceptScore W4241342687C2779227376 @default.
- W4241342687 hasConceptScore W4241342687C48940184 @default.
- W4241342687 hasConceptScore W4241342687C49040817 @default.
- W4241342687 hasConceptScore W4241342687C62520636 @default.
- W4241342687 hasConceptScore W4241342687C6648577 @default.
- W4241342687 hasConceptScore W4241342687C82706917 @default.
- W4241342687 hasLocation W42413426871 @default.
- W4241342687 hasOpenAccess W4241342687 @default.
- W4241342687 hasPrimaryLocation W42413426871 @default.
- W4241342687 hasRelatedWork W2017246694 @default.
- W4241342687 hasRelatedWork W2022949630 @default.
- W4241342687 hasRelatedWork W2049342529 @default.
- W4241342687 hasRelatedWork W2059112004 @default.
- W4241342687 hasRelatedWork W2082753364 @default.
- W4241342687 hasRelatedWork W2139606557 @default.
- W4241342687 hasRelatedWork W2239343226 @default.
- W4241342687 hasRelatedWork W2366161362 @default.
- W4241342687 hasRelatedWork W3197419717 @default.
- W4241342687 hasRelatedWork W67183178 @default.
- W4241342687 isParatext "false" @default.
- W4241342687 isRetracted "false" @default.
- W4241342687 workType "article" @default.