Matches in SemOpenAlex for { <https://semopenalex.org/work/W4241376032> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W4241376032 abstract "Atomic layer etching (ALE), a cyclic process of surface modification and removal of the modified layer, is an emerging damage-less etching technology for semiconductor fabrication with a feature size of less than 10 nm. Among the plasma sources, inductively coupled plasma (ICP) can be a candidate for ALE, but there is a lack of research linking discharge physics to the ALE process. In this study, we comprehensively investigated the discharge physics of ICPs with a radio frequency (RF) bias and Ar/C4F6 mixture to be considered for the ALE process. Detailed studies on the discharge physics were conducted in each step of ALE (i.e., modification step, removal step) as well as the whole cycle as follows: (1) In the general ALE cycle, plasma properties dependent on the chamber geometry and the discharge mode of the ICP were analyzed; (2) in the modification step, a plasma instability with molecular gas was observed. The timescale for molecular gas removal was also investigated; (3) in the removal step, changes in plasma characteristics with the RF bias power were studied. Based on measurements of these plasma physical parameters, the discharge condition for ALE was optimized. ALE was performed on various thin films, including a-Si, poly c-Si, SiO2, and Si3N4. For each thin film, thicknesses of 0.5–2.0 nm were etched per cycle, as in quasi-ALE. Finally, ALE was performed on a patterned wafer, and the etch thickness of 0.6 nm per cycle and fine etch profile were obtained." @default.
- W4241376032 created "2022-05-12" @default.
- W4241376032 date "2021-06-03" @default.
- W4241376032 modified "2023-09-23" @default.
- W4241376032 title "10.1063/5.0047811.2" @default.
- W4241376032 doi "https://doi.org/10.1063/5.0047811.2" @default.
- W4241376032 hasPublicationYear "2021" @default.
- W4241376032 type Work @default.
- W4241376032 citedByCount "0" @default.
- W4241376032 crossrefType "dataset" @default.
- W4241376032 hasConcept C100460472 @default.
- W4241376032 hasConcept C107187091 @default.
- W4241376032 hasConcept C113196181 @default.
- W4241376032 hasConcept C115537861 @default.
- W4241376032 hasConcept C121332964 @default.
- W4241376032 hasConcept C127413603 @default.
- W4241376032 hasConcept C130472188 @default.
- W4241376032 hasConcept C136525101 @default.
- W4241376032 hasConcept C142724271 @default.
- W4241376032 hasConcept C160671074 @default.
- W4241376032 hasConcept C171250308 @default.
- W4241376032 hasConcept C185592680 @default.
- W4241376032 hasConcept C192562407 @default.
- W4241376032 hasConcept C204787440 @default.
- W4241376032 hasConcept C2779227376 @default.
- W4241376032 hasConcept C42360764 @default.
- W4241376032 hasConcept C43617362 @default.
- W4241376032 hasConcept C49040817 @default.
- W4241376032 hasConcept C62520636 @default.
- W4241376032 hasConcept C71924100 @default.
- W4241376032 hasConcept C82706917 @default.
- W4241376032 hasConcept C95974651 @default.
- W4241376032 hasConceptScore W4241376032C100460472 @default.
- W4241376032 hasConceptScore W4241376032C107187091 @default.
- W4241376032 hasConceptScore W4241376032C113196181 @default.
- W4241376032 hasConceptScore W4241376032C115537861 @default.
- W4241376032 hasConceptScore W4241376032C121332964 @default.
- W4241376032 hasConceptScore W4241376032C127413603 @default.
- W4241376032 hasConceptScore W4241376032C130472188 @default.
- W4241376032 hasConceptScore W4241376032C136525101 @default.
- W4241376032 hasConceptScore W4241376032C142724271 @default.
- W4241376032 hasConceptScore W4241376032C160671074 @default.
- W4241376032 hasConceptScore W4241376032C171250308 @default.
- W4241376032 hasConceptScore W4241376032C185592680 @default.
- W4241376032 hasConceptScore W4241376032C192562407 @default.
- W4241376032 hasConceptScore W4241376032C204787440 @default.
- W4241376032 hasConceptScore W4241376032C2779227376 @default.
- W4241376032 hasConceptScore W4241376032C42360764 @default.
- W4241376032 hasConceptScore W4241376032C43617362 @default.
- W4241376032 hasConceptScore W4241376032C49040817 @default.
- W4241376032 hasConceptScore W4241376032C62520636 @default.
- W4241376032 hasConceptScore W4241376032C71924100 @default.
- W4241376032 hasConceptScore W4241376032C82706917 @default.
- W4241376032 hasConceptScore W4241376032C95974651 @default.
- W4241376032 hasLocation W42413760321 @default.
- W4241376032 hasOpenAccess W4241376032 @default.
- W4241376032 hasPrimaryLocation W42413760321 @default.
- W4241376032 hasRelatedWork W1544774047 @default.
- W4241376032 hasRelatedWork W1992219747 @default.
- W4241376032 hasRelatedWork W1994229930 @default.
- W4241376032 hasRelatedWork W2052794911 @default.
- W4241376032 hasRelatedWork W2059112004 @default.
- W4241376032 hasRelatedWork W2065108417 @default.
- W4241376032 hasRelatedWork W2385387985 @default.
- W4241376032 hasRelatedWork W2646369260 @default.
- W4241376032 hasRelatedWork W2921533508 @default.
- W4241376032 hasRelatedWork W65767922 @default.
- W4241376032 isParatext "false" @default.
- W4241376032 isRetracted "false" @default.
- W4241376032 workType "dataset" @default.