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- W4241743313 endingPage "493" @default.
- W4241743313 startingPage "487" @default.
- W4241743313 abstract "In the present paper the influence of oxygen rf plasma treatment on the properties of both Si and SiO2 sides of the wet thermal SiO2/Si interface was investigated. The defect concentrations of the oxide charge, dopant level and the interface trap density were obtained from capacitance–voltage (C—V) characterization. The amount of hydrogen trapped in the interfacial region was estimated from changes in the doping density of the silicon substrate. Generation and passivation of electrically active defect centers were found depending on the substrate temperature and the amount of hydrogen. Modification of the oxide and interface between Si and wet SiO2 is inferred. Plasma promoted release from the oxide bulk of hydrogen species is suggested." @default.
- W4241743313 created "2022-05-12" @default.
- W4241743313 creator A5027431619 @default.
- W4241743313 creator A5076707230 @default.
- W4241743313 date "1999-02-01" @default.
- W4241743313 modified "2023-10-13" @default.
- W4241743313 title "Charged Defects in Wet SiO2/Si Structure Modified by RF Oxygen Plasma Treatment" @default.
- W4241743313 doi "https://doi.org/10.1002/(sici)1521-396x(199902)171:2<487::aid-pssa487>3.3.co;2-s" @default.
- W4241743313 hasPublicationYear "1999" @default.
- W4241743313 type Work @default.
- W4241743313 citedByCount "0" @default.
- W4241743313 crossrefType "journal-article" @default.
- W4241743313 hasAuthorship W4241743313A5027431619 @default.
- W4241743313 hasAuthorship W4241743313A5076707230 @default.
- W4241743313 hasConcept C111368507 @default.
- W4241743313 hasConcept C113196181 @default.
- W4241743313 hasConcept C121332964 @default.
- W4241743313 hasConcept C127313418 @default.
- W4241743313 hasConcept C147789679 @default.
- W4241743313 hasConcept C161790260 @default.
- W4241743313 hasConcept C167710798 @default.
- W4241743313 hasConcept C171250308 @default.
- W4241743313 hasConcept C17525397 @default.
- W4241743313 hasConcept C178790620 @default.
- W4241743313 hasConcept C185592680 @default.
- W4241743313 hasConcept C191897082 @default.
- W4241743313 hasConcept C191952053 @default.
- W4241743313 hasConcept C192562407 @default.
- W4241743313 hasConcept C2777289219 @default.
- W4241743313 hasConcept C2779227376 @default.
- W4241743313 hasConcept C2779851234 @default.
- W4241743313 hasConcept C30066665 @default.
- W4241743313 hasConcept C33574316 @default.
- W4241743313 hasConcept C43617362 @default.
- W4241743313 hasConcept C49040817 @default.
- W4241743313 hasConcept C512968161 @default.
- W4241743313 hasConcept C540031477 @default.
- W4241743313 hasConcept C544956773 @default.
- W4241743313 hasConcept C55493867 @default.
- W4241743313 hasConcept C57863236 @default.
- W4241743313 hasConcept C62520636 @default.
- W4241743313 hasConcept C82706917 @default.
- W4241743313 hasConceptScore W4241743313C111368507 @default.
- W4241743313 hasConceptScore W4241743313C113196181 @default.
- W4241743313 hasConceptScore W4241743313C121332964 @default.
- W4241743313 hasConceptScore W4241743313C127313418 @default.
- W4241743313 hasConceptScore W4241743313C147789679 @default.
- W4241743313 hasConceptScore W4241743313C161790260 @default.
- W4241743313 hasConceptScore W4241743313C167710798 @default.
- W4241743313 hasConceptScore W4241743313C171250308 @default.
- W4241743313 hasConceptScore W4241743313C17525397 @default.
- W4241743313 hasConceptScore W4241743313C178790620 @default.
- W4241743313 hasConceptScore W4241743313C185592680 @default.
- W4241743313 hasConceptScore W4241743313C191897082 @default.
- W4241743313 hasConceptScore W4241743313C191952053 @default.
- W4241743313 hasConceptScore W4241743313C192562407 @default.
- W4241743313 hasConceptScore W4241743313C2777289219 @default.
- W4241743313 hasConceptScore W4241743313C2779227376 @default.
- W4241743313 hasConceptScore W4241743313C2779851234 @default.
- W4241743313 hasConceptScore W4241743313C30066665 @default.
- W4241743313 hasConceptScore W4241743313C33574316 @default.
- W4241743313 hasConceptScore W4241743313C43617362 @default.
- W4241743313 hasConceptScore W4241743313C49040817 @default.
- W4241743313 hasConceptScore W4241743313C512968161 @default.
- W4241743313 hasConceptScore W4241743313C540031477 @default.
- W4241743313 hasConceptScore W4241743313C544956773 @default.
- W4241743313 hasConceptScore W4241743313C55493867 @default.
- W4241743313 hasConceptScore W4241743313C57863236 @default.
- W4241743313 hasConceptScore W4241743313C62520636 @default.
- W4241743313 hasConceptScore W4241743313C82706917 @default.
- W4241743313 hasIssue "2" @default.
- W4241743313 hasLocation W42417433131 @default.
- W4241743313 hasOpenAccess W4241743313 @default.
- W4241743313 hasPrimaryLocation W42417433131 @default.
- W4241743313 hasRelatedWork W1966205888 @default.
- W4241743313 hasRelatedWork W1967226487 @default.
- W4241743313 hasRelatedWork W1983890321 @default.
- W4241743313 hasRelatedWork W2000235795 @default.
- W4241743313 hasRelatedWork W2058418065 @default.
- W4241743313 hasRelatedWork W2063548224 @default.
- W4241743313 hasRelatedWork W2090143721 @default.
- W4241743313 hasRelatedWork W2336502962 @default.
- W4241743313 hasRelatedWork W2969149588 @default.
- W4241743313 hasRelatedWork W955426355 @default.
- W4241743313 hasVolume "171" @default.
- W4241743313 isParatext "false" @default.
- W4241743313 isRetracted "false" @default.
- W4241743313 workType "article" @default.