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- W4242885477 abstract "ADVERTISEMENT RETURN TO BOOKPREVPrefaceNEXTPrefaceHIROSHI ITOHIROSHI ITOIBM Almaden Research Center 650 Harry Road San Jose, CA 95120More by HIROSHI ITO, SEIICHI TAGAWASEIICHI TAGAWAOsaka University 8-1 Mihogaoka Ibaraki, Osaka 567 JapanMore by SEIICHI TAGAWA, and KAZUYUKI HORIEKAZUYUKI HORIEFaculty of Engineering University of Tokyo 7-3-1 Hongo Bunkyo-ku, Tokyo 113 JapanMore by KAZUYUKI HORIEDOI: 10.1021/bk-1994-0579.pr001Publication Date (Print):May 5, 1995Publication History Published online23 July 2009Published inprint 5 May 1995RIGHTS & PERMISSIONSPolymeric Materials for Microelectronic Applicationsp ixACS Symposium SeriesVol. 579ISBN13: 9780841230552eISBN: 9780841215009 Copyright © 1994 American Chemical SocietyChapter Views103Citations-LEARN ABOUT THESE METRICSChapter Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InReddit PDF (255 KB) Get e-Alerts" @default.
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- W4242885477 date "1995-05-05" @default.
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- W4242885477 title "Preface" @default.
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