Matches in SemOpenAlex for { <https://semopenalex.org/work/W4242986887> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W4242986887 abstract "This study is dedicated to a better understanding of the processes occurring under ion bombardment of ultra-thin ZrO2/SiO2/Si gate dielectric stacks. Complex-shaped depth profiles were obtained by using TOF-SIMS with dual beam (500 eV for sputtering and 10 keV for analysis) Ar+ ions. The SIMS intensities of all the elements depend critically on the amount of oxygen at any moment of the sputtering process. Increased intensity is observed at the surface and at the ZrO2/SiO2 interface. A long tail of the Zr signal is present in the Si substrate, even after the second (SiO2/Si) interface, and a double bump structure in the 90Zr and ZrO dimer is observed, which is more pronounced with increasing thickness of the interfacial SiO2 layer. Computer simulations using the dynamic Monte Carlo code (TRIDYN) are performed in order to distinguish the ion-bombardment-induced effects from changes in the ionization degree. The original code is extended with simple models for the ionization mechanism and for the molecular yield during sputtering. Oxygen preferential sputtering at the surface and ballistic transport of Zr towards and through the interface are clearly demonstrated, but there is also evidence that due to recoil implantation oxygen gets piled-up near the ZrO2/SiO2 interface." @default.
- W4242986887 created "2022-05-12" @default.
- W4242986887 creator A5003816795 @default.
- W4242986887 date "2004-05-01" @default.
- W4242986887 modified "2023-09-27" @default.
- W4242986887 title "Depth profiling of ZrO2/SiO2/Si stacks?a TOF-SIMS and computer simulation study" @default.
- W4242986887 doi "https://doi.org/10.1016/s0169-4332(04)00359-9" @default.
- W4242986887 hasPublicationYear "2004" @default.
- W4242986887 type Work @default.
- W4242986887 citedByCount "0" @default.
- W4242986887 crossrefType "journal-article" @default.
- W4242986887 hasAuthorship W4242986887A5003816795 @default.
- W4242986887 hasConcept C113196181 @default.
- W4242986887 hasConcept C121332964 @default.
- W4242986887 hasConcept C145148216 @default.
- W4242986887 hasConcept C171250308 @default.
- W4242986887 hasConcept C178790620 @default.
- W4242986887 hasConcept C184779094 @default.
- W4242986887 hasConcept C185592680 @default.
- W4242986887 hasConcept C19067145 @default.
- W4242986887 hasConcept C192562407 @default.
- W4242986887 hasConcept C198291218 @default.
- W4242986887 hasConcept C22423302 @default.
- W4242986887 hasConcept C2776668124 @default.
- W4242986887 hasConcept C41999313 @default.
- W4242986887 hasConcept C43617362 @default.
- W4242986887 hasConcept C49040817 @default.
- W4242986887 hasConcept C540031477 @default.
- W4242986887 hasConcept C544956773 @default.
- W4242986887 hasConcept C77671233 @default.
- W4242986887 hasConceptScore W4242986887C113196181 @default.
- W4242986887 hasConceptScore W4242986887C121332964 @default.
- W4242986887 hasConceptScore W4242986887C145148216 @default.
- W4242986887 hasConceptScore W4242986887C171250308 @default.
- W4242986887 hasConceptScore W4242986887C178790620 @default.
- W4242986887 hasConceptScore W4242986887C184779094 @default.
- W4242986887 hasConceptScore W4242986887C185592680 @default.
- W4242986887 hasConceptScore W4242986887C19067145 @default.
- W4242986887 hasConceptScore W4242986887C192562407 @default.
- W4242986887 hasConceptScore W4242986887C198291218 @default.
- W4242986887 hasConceptScore W4242986887C22423302 @default.
- W4242986887 hasConceptScore W4242986887C2776668124 @default.
- W4242986887 hasConceptScore W4242986887C41999313 @default.
- W4242986887 hasConceptScore W4242986887C43617362 @default.
- W4242986887 hasConceptScore W4242986887C49040817 @default.
- W4242986887 hasConceptScore W4242986887C540031477 @default.
- W4242986887 hasConceptScore W4242986887C544956773 @default.
- W4242986887 hasConceptScore W4242986887C77671233 @default.
- W4242986887 hasLocation W42429868871 @default.
- W4242986887 hasOpenAccess W4242986887 @default.
- W4242986887 hasPrimaryLocation W42429868871 @default.
- W4242986887 hasRelatedWork W1488984904 @default.
- W4242986887 hasRelatedWork W1620395646 @default.
- W4242986887 hasRelatedWork W1981016431 @default.
- W4242986887 hasRelatedWork W2024127000 @default.
- W4242986887 hasRelatedWork W2040618205 @default.
- W4242986887 hasRelatedWork W2050446700 @default.
- W4242986887 hasRelatedWork W2077672766 @default.
- W4242986887 hasRelatedWork W2087288237 @default.
- W4242986887 hasRelatedWork W2140325234 @default.
- W4242986887 hasRelatedWork W2348991920 @default.
- W4242986887 isParatext "false" @default.
- W4242986887 isRetracted "false" @default.
- W4242986887 workType "article" @default.