Matches in SemOpenAlex for { <https://semopenalex.org/work/W4244532023> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W4244532023 endingPage "368" @default.
- W4244532023 startingPage "368" @default.
- W4244532023 abstract "Ultra-thin interfacial silicon oxide layers are grown by microwave-based plasma oxidation at temperatures below 200 °C. The influence of plasma gas composition and plasma pulsing on layer properties is tested. The oxides are compared to standard thermally grown oxide and wet chemical oxide. Layer properties are evaluated by x-ray photo electron spectroscopy and are electrically characterized by means of TiN/HfO2/SiO2 high-k metal gate stacks." @default.
- W4244532023 created "2022-05-12" @default.
- W4244532023 creator A5000722191 @default.
- W4244532023 creator A5011551104 @default.
- W4244532023 creator A5053460050 @default.
- W4244532023 date "1976-05-01" @default.
- W4244532023 modified "2023-10-18" @default.
- W4244532023 title "Profiles of the optical absorption constant and the interface composition in epitaxial silicon films" @default.
- W4244532023 doi "https://doi.org/10.1016/0040-6090(76)90493-4" @default.
- W4244532023 hasPublicationYear "1976" @default.
- W4244532023 type Work @default.
- W4244532023 citedByCount "0" @default.
- W4244532023 crossrefType "journal-article" @default.
- W4244532023 hasAuthorship W4244532023A5000722191 @default.
- W4244532023 hasAuthorship W4244532023A5011551104 @default.
- W4244532023 hasAuthorship W4244532023A5053460050 @default.
- W4244532023 hasConcept C110738630 @default.
- W4244532023 hasConcept C113196181 @default.
- W4244532023 hasConcept C121332964 @default.
- W4244532023 hasConcept C125287762 @default.
- W4244532023 hasConcept C149849071 @default.
- W4244532023 hasConcept C159985019 @default.
- W4244532023 hasConcept C165801399 @default.
- W4244532023 hasConcept C171250308 @default.
- W4244532023 hasConcept C172385210 @default.
- W4244532023 hasConcept C178790620 @default.
- W4244532023 hasConcept C185592680 @default.
- W4244532023 hasConcept C19067145 @default.
- W4244532023 hasConcept C191897082 @default.
- W4244532023 hasConcept C192562407 @default.
- W4244532023 hasConcept C2361726 @default.
- W4244532023 hasConcept C2777431650 @default.
- W4244532023 hasConcept C2779105228 @default.
- W4244532023 hasConcept C2779227376 @default.
- W4244532023 hasConcept C2779851234 @default.
- W4244532023 hasConcept C2780924660 @default.
- W4244532023 hasConcept C43617362 @default.
- W4244532023 hasConcept C44838205 @default.
- W4244532023 hasConcept C49040817 @default.
- W4244532023 hasConcept C52780932 @default.
- W4244532023 hasConcept C544153396 @default.
- W4244532023 hasConcept C544956773 @default.
- W4244532023 hasConcept C62520636 @default.
- W4244532023 hasConcept C82706917 @default.
- W4244532023 hasConceptScore W4244532023C110738630 @default.
- W4244532023 hasConceptScore W4244532023C113196181 @default.
- W4244532023 hasConceptScore W4244532023C121332964 @default.
- W4244532023 hasConceptScore W4244532023C125287762 @default.
- W4244532023 hasConceptScore W4244532023C149849071 @default.
- W4244532023 hasConceptScore W4244532023C159985019 @default.
- W4244532023 hasConceptScore W4244532023C165801399 @default.
- W4244532023 hasConceptScore W4244532023C171250308 @default.
- W4244532023 hasConceptScore W4244532023C172385210 @default.
- W4244532023 hasConceptScore W4244532023C178790620 @default.
- W4244532023 hasConceptScore W4244532023C185592680 @default.
- W4244532023 hasConceptScore W4244532023C19067145 @default.
- W4244532023 hasConceptScore W4244532023C191897082 @default.
- W4244532023 hasConceptScore W4244532023C192562407 @default.
- W4244532023 hasConceptScore W4244532023C2361726 @default.
- W4244532023 hasConceptScore W4244532023C2777431650 @default.
- W4244532023 hasConceptScore W4244532023C2779105228 @default.
- W4244532023 hasConceptScore W4244532023C2779227376 @default.
- W4244532023 hasConceptScore W4244532023C2779851234 @default.
- W4244532023 hasConceptScore W4244532023C2780924660 @default.
- W4244532023 hasConceptScore W4244532023C43617362 @default.
- W4244532023 hasConceptScore W4244532023C44838205 @default.
- W4244532023 hasConceptScore W4244532023C49040817 @default.
- W4244532023 hasConceptScore W4244532023C52780932 @default.
- W4244532023 hasConceptScore W4244532023C544153396 @default.
- W4244532023 hasConceptScore W4244532023C544956773 @default.
- W4244532023 hasConceptScore W4244532023C62520636 @default.
- W4244532023 hasConceptScore W4244532023C82706917 @default.
- W4244532023 hasIssue "2" @default.
- W4244532023 hasLocation W42445320231 @default.
- W4244532023 hasOpenAccess W4244532023 @default.
- W4244532023 hasPrimaryLocation W42445320231 @default.
- W4244532023 hasRelatedWork W1964443114 @default.
- W4244532023 hasRelatedWork W1966833149 @default.
- W4244532023 hasRelatedWork W1970594364 @default.
- W4244532023 hasRelatedWork W1971913561 @default.
- W4244532023 hasRelatedWork W1990821540 @default.
- W4244532023 hasRelatedWork W2076502257 @default.
- W4244532023 hasRelatedWork W2130608479 @default.
- W4244532023 hasRelatedWork W2474880373 @default.
- W4244532023 hasRelatedWork W2510178600 @default.
- W4244532023 hasRelatedWork W4302375762 @default.
- W4244532023 hasVolume "34" @default.
- W4244532023 isParatext "false" @default.
- W4244532023 isRetracted "false" @default.
- W4244532023 workType "article" @default.