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- W4245087604 abstract "We have demonstrated significant advances in the production of aspheric optics for extreme ultraviolet lithography. An optic has been fabricated with an aspheric departure of 1.5 {mu}m, a figure error of 0.7 nm rms and a nanoroughness of 0.25 nm rms. Further improvements are required in the figure and nanoroughness to reach high throughput and near diffraction limited performance in an EUVL system. 8 refs., 2 figs." @default.
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- W4245087604 date "1996-05-01" @default.
- W4245087604 modified "2023-09-25" @default.
- W4245087604 title "Precision optical aspheres for extreme ultraviolet lithography" @default.
- W4245087604 doi "https://doi.org/10.2172/281722" @default.
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