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- W4245372713 endingPage "4" @default.
- W4245372713 startingPage "1" @default.
- W4245372713 abstract "Abstract In this paper, the effect of silicon (Si) cap packaging on the BiCMOS embedded RF-MEMS switch performance is studied. The RF-MEMS switches are designed and fabricated in a 0.25μm SiGe BiCMOS technology for K-band (18 – 27 GHz) applications. The packaging is done based on a wafer-to-wafer bonding technique and the RF-MEMS switches are electrically characterized before and after the Si cap packaging. The experimental data shows the effect of the wafer-level Si cap package on the C-V and S-parameter measurements. The performed 3D FEM simulations prove that the low resistive Si cap, specifically 1 Ω·cm, results in a significant RF performance degradation of the RF-MEMS switch in terms of insertion loss." @default.
- W4245372713 created "2022-05-12" @default.
- W4245372713 creator A5005054879 @default.
- W4245372713 creator A5005168917 @default.
- W4245372713 creator A5011390917 @default.
- W4245372713 creator A5035482743 @default.
- W4245372713 creator A5063640077 @default.
- W4245372713 creator A5075067410 @default.
- W4245372713 creator A5082585588 @default.
- W4245372713 date "2017-07-01" @default.
- W4245372713 modified "2023-09-27" @default.
- W4245372713 title "Effect of wafer-level silicon cap packaging on BiCMOS embedded RF-MEMS switch performance" @default.
- W4245372713 doi "https://doi.org/10.4071/2017-nor-wipf" @default.
- W4245372713 hasPublicationYear "2017" @default.
- W4245372713 type Work @default.
- W4245372713 citedByCount "0" @default.
- W4245372713 crossrefType "journal-article" @default.
- W4245372713 hasAuthorship W4245372713A5005054879 @default.
- W4245372713 hasAuthorship W4245372713A5005168917 @default.
- W4245372713 hasAuthorship W4245372713A5011390917 @default.
- W4245372713 hasAuthorship W4245372713A5035482743 @default.
- W4245372713 hasAuthorship W4245372713A5063640077 @default.
- W4245372713 hasAuthorship W4245372713A5075067410 @default.
- W4245372713 hasAuthorship W4245372713A5082585588 @default.
- W4245372713 hasConcept C119599485 @default.
- W4245372713 hasConcept C127413603 @default.
- W4245372713 hasConcept C160671074 @default.
- W4245372713 hasConcept C165801399 @default.
- W4245372713 hasConcept C172385210 @default.
- W4245372713 hasConcept C192562407 @default.
- W4245372713 hasConcept C24326235 @default.
- W4245372713 hasConcept C2779133538 @default.
- W4245372713 hasConcept C2780288131 @default.
- W4245372713 hasConcept C37977207 @default.
- W4245372713 hasConcept C49040817 @default.
- W4245372713 hasConcept C544956773 @default.
- W4245372713 hasConcept C62427370 @default.
- W4245372713 hasConcept C6899612 @default.
- W4245372713 hasConcept C74064498 @default.
- W4245372713 hasConcept C90327742 @default.
- W4245372713 hasConceptScore W4245372713C119599485 @default.
- W4245372713 hasConceptScore W4245372713C127413603 @default.
- W4245372713 hasConceptScore W4245372713C160671074 @default.
- W4245372713 hasConceptScore W4245372713C165801399 @default.
- W4245372713 hasConceptScore W4245372713C172385210 @default.
- W4245372713 hasConceptScore W4245372713C192562407 @default.
- W4245372713 hasConceptScore W4245372713C24326235 @default.
- W4245372713 hasConceptScore W4245372713C2779133538 @default.
- W4245372713 hasConceptScore W4245372713C2780288131 @default.
- W4245372713 hasConceptScore W4245372713C37977207 @default.
- W4245372713 hasConceptScore W4245372713C49040817 @default.
- W4245372713 hasConceptScore W4245372713C544956773 @default.
- W4245372713 hasConceptScore W4245372713C62427370 @default.
- W4245372713 hasConceptScore W4245372713C6899612 @default.
- W4245372713 hasConceptScore W4245372713C74064498 @default.
- W4245372713 hasConceptScore W4245372713C90327742 @default.
- W4245372713 hasIssue "NOR" @default.
- W4245372713 hasLocation W42453727131 @default.
- W4245372713 hasOpenAccess W4245372713 @default.
- W4245372713 hasPrimaryLocation W42453727131 @default.
- W4245372713 hasRelatedWork W2098107189 @default.
- W4245372713 hasRelatedWork W2110295870 @default.
- W4245372713 hasRelatedWork W2138948081 @default.
- W4245372713 hasRelatedWork W2164354707 @default.
- W4245372713 hasRelatedWork W2164465162 @default.
- W4245372713 hasRelatedWork W2533048103 @default.
- W4245372713 hasRelatedWork W2560618290 @default.
- W4245372713 hasRelatedWork W2744533482 @default.
- W4245372713 hasRelatedWork W3028351514 @default.
- W4245372713 hasRelatedWork W4245372713 @default.
- W4245372713 hasVolume "2017" @default.
- W4245372713 isParatext "false" @default.
- W4245372713 isRetracted "false" @default.
- W4245372713 workType "article" @default.