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- W4245761027 abstract "Optical fabrication is the manufacture of optical components such as passive optics – e.g. lenses, transmission flats, mirrors, and prisms – and active optics – e.g. laser-gain media, frequency converters, polarizers, and adaptive optics. An ideal optical-fabrication process is one optimized for all the following four major characteristics: surface figure, surface quality, surface roughness, and material removal rate. The overall objective of all optical-fabrication process steps is to remove material from the workpiece in a controlled fashion to meet the specifications of the next or final process step. Chemical mechanical planarization (CMP) processes tend to be conducted at very high pressures, high relative velocities, and short polishing times often minutes for final polishing and tens of minutes for stock removal. The key objective of CMP is to planarize the various layers of multilayer structures of a variety of materials with little or no defectivity." @default.
- W4245761027 created "2022-05-12" @default.
- W4245761027 date "2018-08-06" @default.
- W4245761027 modified "2023-09-26" @default.
- W4245761027 title "Introduction" @default.
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- W4245761027 doi "https://doi.org/10.1002/9781119423775.ch1" @default.
- W4245761027 hasPublicationYear "2018" @default.
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