Matches in SemOpenAlex for { <https://semopenalex.org/work/W4246367202> ?p ?o ?g. }
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- W4246367202 endingPage "322" @default.
- W4246367202 startingPage "317" @default.
- W4246367202 abstract "An analysis is given of the temperature dependence of the segregation of phosphorus during chemical vapour deposition. The observed temperature dependence is compared with a theoretical expression which takes into account the ionization of P in the solid. From both expressions the differential heat of solution of P in Si can be calculated to be -14.9 ± 2.3 kcal, the uncertainty being mainly due to the unknown value of the bandgap of silicon at high temperatures. The heat of solution can be broken down – amongst others – into a binding part and a strain part for the incorporation of P in Si. The strain energy can be calculated to be 2.2 kcal, which gives an energy of 50.2 ± 0.6 kcal for the binding energy of the P–Si bond, close to the value of the Si—Si bond itself being 53.25 kcal." @default.
- W4246367202 created "2022-05-12" @default.
- W4246367202 creator A5006299449 @default.
- W4246367202 creator A5035962193 @default.
- W4246367202 date "1975-01-01" @default.
- W4246367202 modified "2023-09-29" @default.
- W4246367202 title "THE INCORPORATION OF PHOSPHORUS IN SILICON; THE TEMPERATURE DEPENDENCE OF THE SEGREGATION COEFFICIENT" @default.
- W4246367202 doi "https://doi.org/10.1016/b978-1-4831-9854-5.50047-1" @default.
- W4246367202 hasPublicationYear "1975" @default.
- W4246367202 type Work @default.
- W4246367202 citedByCount "0" @default.
- W4246367202 crossrefType "book-chapter" @default.
- W4246367202 hasAuthorship W4246367202A5006299449 @default.
- W4246367202 hasAuthorship W4246367202A5035962193 @default.
- W4246367202 hasConcept C121332964 @default.
- W4246367202 hasConcept C122032599 @default.
- W4246367202 hasConcept C126322002 @default.
- W4246367202 hasConcept C145148216 @default.
- W4246367202 hasConcept C147192597 @default.
- W4246367202 hasConcept C151730666 @default.
- W4246367202 hasConcept C159985019 @default.
- W4246367202 hasConcept C16643434 @default.
- W4246367202 hasConcept C171250308 @default.
- W4246367202 hasConcept C178790620 @default.
- W4246367202 hasConcept C185592680 @default.
- W4246367202 hasConcept C191897082 @default.
- W4246367202 hasConcept C192562407 @default.
- W4246367202 hasConcept C198291218 @default.
- W4246367202 hasConcept C2778022156 @default.
- W4246367202 hasConcept C2816523 @default.
- W4246367202 hasConcept C32909587 @default.
- W4246367202 hasConcept C510538283 @default.
- W4246367202 hasConcept C544956773 @default.
- W4246367202 hasConcept C57410435 @default.
- W4246367202 hasConcept C64297162 @default.
- W4246367202 hasConcept C71924100 @default.
- W4246367202 hasConcept C86803240 @default.
- W4246367202 hasConcept C97355855 @default.
- W4246367202 hasConceptScore W4246367202C121332964 @default.
- W4246367202 hasConceptScore W4246367202C122032599 @default.
- W4246367202 hasConceptScore W4246367202C126322002 @default.
- W4246367202 hasConceptScore W4246367202C145148216 @default.
- W4246367202 hasConceptScore W4246367202C147192597 @default.
- W4246367202 hasConceptScore W4246367202C151730666 @default.
- W4246367202 hasConceptScore W4246367202C159985019 @default.
- W4246367202 hasConceptScore W4246367202C16643434 @default.
- W4246367202 hasConceptScore W4246367202C171250308 @default.
- W4246367202 hasConceptScore W4246367202C178790620 @default.
- W4246367202 hasConceptScore W4246367202C185592680 @default.
- W4246367202 hasConceptScore W4246367202C191897082 @default.
- W4246367202 hasConceptScore W4246367202C192562407 @default.
- W4246367202 hasConceptScore W4246367202C198291218 @default.
- W4246367202 hasConceptScore W4246367202C2778022156 @default.
- W4246367202 hasConceptScore W4246367202C2816523 @default.
- W4246367202 hasConceptScore W4246367202C32909587 @default.
- W4246367202 hasConceptScore W4246367202C510538283 @default.
- W4246367202 hasConceptScore W4246367202C544956773 @default.
- W4246367202 hasConceptScore W4246367202C57410435 @default.
- W4246367202 hasConceptScore W4246367202C64297162 @default.
- W4246367202 hasConceptScore W4246367202C71924100 @default.
- W4246367202 hasConceptScore W4246367202C86803240 @default.
- W4246367202 hasConceptScore W4246367202C97355855 @default.
- W4246367202 hasLocation W42463672021 @default.
- W4246367202 hasOpenAccess W4246367202 @default.
- W4246367202 hasPrimaryLocation W42463672021 @default.
- W4246367202 hasRelatedWork W1988220623 @default.
- W4246367202 hasRelatedWork W1988845943 @default.
- W4246367202 hasRelatedWork W1994282328 @default.
- W4246367202 hasRelatedWork W2024063401 @default.
- W4246367202 hasRelatedWork W2042172581 @default.
- W4246367202 hasRelatedWork W2068206282 @default.
- W4246367202 hasRelatedWork W2312552982 @default.
- W4246367202 hasRelatedWork W2899084033 @default.
- W4246367202 hasRelatedWork W3092602645 @default.
- W4246367202 hasRelatedWork W2619294717 @default.
- W4246367202 isParatext "false" @default.
- W4246367202 isRetracted "false" @default.
- W4246367202 workType "book-chapter" @default.