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- W4246873752 abstract "Currently machines in a parallel work center in semiconductor manufactory are assumed uniform in terms of impact on yield for most logic to dispatch schedule this machine set. But in reality machines are different even though they are allowed for the same products. In some layer forming areas machines can get a so called health parameter which describes the current condition of the machine. A high health value means, that defects produced with a machine are less probable. Also the products, which are processed at this work center, differ in their complexity and wafer area used for one chip. The goal is to schedule products with a high complexity and a larger chip size to those machines with the best health value. Doing so will minimize defect wafer area. For this, different dispatching rules and a mixed integer programming approach are compared within a simulation model for practical test data." @default.
- W4246873752 created "2022-05-12" @default.
- W4246873752 creator A5009517926 @default.
- W4246873752 creator A5044291605 @default.
- W4246873752 creator A5090994043 @default.
- W4246873752 date "2015-12-01" @default.
- W4246873752 modified "2023-09-26" @default.
- W4246873752 title "Yield integrated scheduling using machine condition parameter" @default.
- W4246873752 cites W2136831582 @default.
- W4246873752 cites W2156993904 @default.
- W4246873752 cites W2169772335 @default.
- W4246873752 cites W2500256624 @default.
- W4246873752 cites W3146122527 @default.
- W4246873752 cites W4236300353 @default.
- W4246873752 cites W4245680394 @default.
- W4246873752 doi "https://doi.org/10.1109/wsc.2015.7408398" @default.
- W4246873752 hasPublicationYear "2015" @default.
- W4246873752 type Work @default.
- W4246873752 citedByCount "3" @default.
- W4246873752 countsByYear W42468737522017 @default.
- W4246873752 countsByYear W42468737522018 @default.
- W4246873752 countsByYear W42468737522019 @default.
- W4246873752 crossrefType "proceedings-article" @default.
- W4246873752 hasAuthorship W4246873752A5009517926 @default.
- W4246873752 hasAuthorship W4246873752A5044291605 @default.
- W4246873752 hasAuthorship W4246873752A5090994043 @default.
- W4246873752 hasConcept C111919701 @default.
- W4246873752 hasConcept C11413529 @default.
- W4246873752 hasConcept C126255220 @default.
- W4246873752 hasConcept C127413603 @default.
- W4246873752 hasConcept C165005293 @default.
- W4246873752 hasConcept C200601418 @default.
- W4246873752 hasConcept C206729178 @default.
- W4246873752 hasConcept C33923547 @default.
- W4246873752 hasConcept C41008148 @default.
- W4246873752 hasConcept C56086750 @default.
- W4246873752 hasConcept C68387754 @default.
- W4246873752 hasConcept C76155785 @default.
- W4246873752 hasConceptScore W4246873752C111919701 @default.
- W4246873752 hasConceptScore W4246873752C11413529 @default.
- W4246873752 hasConceptScore W4246873752C126255220 @default.
- W4246873752 hasConceptScore W4246873752C127413603 @default.
- W4246873752 hasConceptScore W4246873752C165005293 @default.
- W4246873752 hasConceptScore W4246873752C200601418 @default.
- W4246873752 hasConceptScore W4246873752C206729178 @default.
- W4246873752 hasConceptScore W4246873752C33923547 @default.
- W4246873752 hasConceptScore W4246873752C41008148 @default.
- W4246873752 hasConceptScore W4246873752C56086750 @default.
- W4246873752 hasConceptScore W4246873752C68387754 @default.
- W4246873752 hasConceptScore W4246873752C76155785 @default.
- W4246873752 hasLocation W42468737521 @default.
- W4246873752 hasOpenAccess W4246873752 @default.
- W4246873752 hasPrimaryLocation W42468737521 @default.
- W4246873752 hasRelatedWork W141066336 @default.
- W4246873752 hasRelatedWork W1555309241 @default.
- W4246873752 hasRelatedWork W2039356943 @default.
- W4246873752 hasRelatedWork W2093295337 @default.
- W4246873752 hasRelatedWork W2110698131 @default.
- W4246873752 hasRelatedWork W2377013661 @default.
- W4246873752 hasRelatedWork W2480575007 @default.
- W4246873752 hasRelatedWork W2580320498 @default.
- W4246873752 hasRelatedWork W2736069062 @default.
- W4246873752 hasRelatedWork W3142972743 @default.
- W4246873752 isParatext "false" @default.
- W4246873752 isRetracted "false" @default.
- W4246873752 workType "article" @default.