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- W4246984422 abstract "This paper presents an improved touch probe system for higher sensitivity. In this system, three fiber optic displacement sensors measure displacement and direction of a tip ball of the probe. Because the measuring resolution of the displacement was less than 80nm in experiments, a probe pre-travel was determined to 100nm. The variation of the pre-travel was less than 80nm in whole directions. The measuring force was less than 0.8mN in horizontal directions, and was 11mN in vertical direction. A over travel mechanism using kinematic joint requires consideration of its repeatability." @default.
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- W4246984422 date "2003-01-01" @default.
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- W4246984422 title "Three-Dimensional Touch Probe based on Fiber optic displacement sensors (3rd report)" @default.
- W4246984422 doi "https://doi.org/10.1299/jsmemecjo.2003.4.0_161" @default.
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