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• W4247419735 startingPage "153" @default.
• W4247419735 abstract "Abstract Soft lithography represents a non-photolithographic strategy based on self-assembly and replica molding for carrying out micro- and nanofabrication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures. In soft lithography, an elastomeric stamp with patterned relief structures on its surface is used to generate patterns and structures with feature sizes ranging from 30 nm to 100 μm. Five techniques have been demonstrated: microcontact printing (μCP), replica molding (REM), microtransfer molding (μTM), micromolding in capillaries (MIMIC), and solvent-assisted micromolding (SAMIM). In this chapter we discuss the procedures for these techniques and their applications in micro- and nanofabrication, surface chemistry, materials science, optics, MEMS, and microelectronics." @default.
• W4247419735 created "2022-05-12" @default.
• W4247419735 creator A5041556229 @default.
• W4247419735 creator A5051537916 @default.
• W4247419735 date "1998-08-01" @default.
• W4247419735 modified "2023-10-16" @default.
• W4247419735 title "SOFT LITHOGRAPHY" @default.
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