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- W4249272764 abstract "A methodology based on association rule concepts is given for detecting fab tool commonality of affected lots. The performance of the methodology is then compared to several traditional methods such as ANOVA and contingency tables using eight actual production cases. In each case, the offending tool is affecting lots at multiple process layers." @default.
- W4249272764 created "2022-05-12" @default.
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- W4249272764 date "2010-07-01" @default.
- W4249272764 modified "2023-10-18" @default.
- W4249272764 title "Rule induction for identifying multi layer tool commonalities" @default.
- W4249272764 doi "https://doi.org/10.1109/asmc.2010.5551477" @default.
- W4249272764 hasPublicationYear "2010" @default.
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