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- W4249417750 abstract "BOC Edwards has secured the supply of all bulk gases, bulk and specialty gas distribution systems, and chemical and slurry management systems for a semiconductor wafer fabrication facility near Shanghai in China. Services to be provided include design, engineering, installation, start-up and commissioning, including sustained operations for the bulk gas pad." @default.
- W4249417750 created "2022-05-12" @default.
- W4249417750 date "2003-12-01" @default.
- W4249417750 modified "2023-09-23" @default.
- W4249417750 title "BOC Edwards supplies gases for China FAB" @default.
- W4249417750 doi "https://doi.org/10.1016/s1365-6937(03)00017-0" @default.
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