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- W4250358138 abstract "为研究注氮改性对注氧隔离硅材料中埋氧层性质的影响,向其埋氧层内注入了1016 cm-2的高剂量氮.实验结果表明,与未注氮的埋氧层相比,所有注氮的埋氧层中的正电荷密度显著增加.实验还发现,注氮后的退火可使埋氧层内的正电荷密度进一步上升.但与注氮导致的埋氧层内正电荷密度的显著上升相比,退火时间对注氮的埋氧层内正电荷密度的影响不大.电容-电压测量结果显示,在埋氧层内部,注氮后未退火的样品与在1100 ℃的氮气气氛下退火2.5 h的样品相比,二者具有近似相同的等效正电荷" @default.
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- W4250358138 date "2011-01-01" @default.
- W4250358138 modified "2023-10-18" @default.
- W4250358138 title "Influence of high-dose nitrogen implantation on the positive charge density of the buried oxide of silicon-on-insulator wafers" @default.
- W4250358138 doi "https://doi.org/10.7498/aps.60.056104" @default.
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