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- W4251043676 abstract "The adsorption of NO on Si(100) and the electron irradiation effects of an NO-covered surface were studied by XPS, AES, high-resolution electron energy-loss spectroscopy (HREELS), temperature-programmed desorption (TPD) and electron-stimulated desorption (ESD). Nitric oxide both molecularly and dissociatively adsorbs on Si(100) at 110 K. The molecular and dissociative adsorption occurred simultaneously, and reached saturation. The thermal desorption of molecularly adsorbed NO (NO(a)) peaks at ∼200 K. Thermal dissociation of NO(a) was not detected from heating. Electron irradiation of Si(100) in an NO environment gave a dramatic decrease in the elemental Si LVV signal at 92 eV in AES. This indicates the formation of a silicon oxynitride overlayer by electron-stimulated dissociation of NO(a). The overlayer thickness exhibited a linear dependence on the electron irradiation/NO exposure time. An oxynitride growth rate of 0.02 nm min−1 was obtained. Copyright © 2000 John Wiley & Sons, Ltd." @default.
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- W4251043676 date "2000-03-01" @default.
- W4251043676 modified "2023-09-27" @default.
- W4251043676 title "Electron beam‐enhanced oxynitridation of Si(100) by NO adsorption" @default.
- W4251043676 doi "https://doi.org/10.1002/(sici)1096-9918(200003)29:3<188::aid-sia681>3.3.co;2-c" @default.
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