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• W4251247564 abstract "Triple patterning lithography (TPL) has been recognized as one of the most promising candidates for 14/10nm technology node. Apart from obtaining legal TPL decompositions, various concerns have been raised by the designers, among them consistently assigning the same pattern for the same type of standard cells and balancing the usage of the three masks are two most critical ones. In this paper, a hybrid approach (SAT followed by a sliding-window approach) is proposed targeting at these two problems. To assign the same pattern for the same type of standard cell, we pre-color the boundary polygons of each type of cell by solving a small SAT problem. Following that we propose a sliding-window based approach to compute a locally balanced decomposition. Our algorithm guarantees to find a feasible solution if one exists. Experimental results verify that the problem can be solved very efficiently with the proposed algorithm. Superior locally balanced decompositions are achieved compared with the previous approach in." @default.
• W4251247564 created "2022-05-12" @default.
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• W4251247564 date "2013-11-01" @default.
• W4251247564 modified "2023-10-18" @default.
• W4251247564 title "Constrained pattern assignment for standard cell based triple patterning lithography" @default.
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• W4251247564 doi "https://doi.org/10.1109/iccad.2013.6691116" @default.
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