Matches in SemOpenAlex for { <https://semopenalex.org/work/W4251855879> ?p ?o ?g. }
- W4251855879 endingPage "111501" @default.
- W4251855879 startingPage "111501" @default.
- W4251855879 abstract "With many of research on Fourier transform IR (FTIR) on low-k materials, our experiments extended the FTIR spectroscopy application to characterization and analysis of the low-k dielectric thin film properties on patterned wafers. FTIR spectra on low-k materials were successfully captured under three sampling modes: reflection, attenuated total reflectance (ATR), and mapping mode. ATR mode is more suitable for CHx band than reflection mode due to its higher sensitivity in this range. FTIR spectroscopy signal analysis on mixed structures (metal and low-k dielectric material) on patterned wafers was also investigated with mapping mode. Based on our investigation, FTIR can be used for low-k material studies on patterned wafer." @default.
- W4251855879 created "2022-05-12" @default.
- W4251855879 creator A5018559639 @default.
- W4251855879 creator A5021804147 @default.
- W4251855879 creator A5046731462 @default.
- W4251855879 creator A5053447705 @default.
- W4251855879 creator A5066392216 @default.
- W4251855879 creator A5067416815 @default.
- W4251855879 creator A5085304432 @default.
- W4251855879 date "2012-11-01" @default.
- W4251855879 modified "2023-09-22" @default.
- W4251855879 title "Fourier Transform Infrared Spectroscopy of Low-kDielectric Material on Patterned Wafers" @default.
- W4251855879 cites W1966652746 @default.
- W4251855879 cites W1967448867 @default.
- W4251855879 cites W1968678605 @default.
- W4251855879 cites W1978794168 @default.
- W4251855879 cites W1979468312 @default.
- W4251855879 cites W1989811919 @default.
- W4251855879 cites W1992113014 @default.
- W4251855879 cites W1993189841 @default.
- W4251855879 cites W1996093533 @default.
- W4251855879 cites W2000597223 @default.
- W4251855879 cites W2002393286 @default.
- W4251855879 cites W2014944380 @default.
- W4251855879 cites W2020184710 @default.
- W4251855879 cites W2020926300 @default.
- W4251855879 cites W2024191423 @default.
- W4251855879 cites W2036244219 @default.
- W4251855879 cites W2040486726 @default.
- W4251855879 cites W2045265704 @default.
- W4251855879 cites W2051376844 @default.
- W4251855879 cites W2054488904 @default.
- W4251855879 cites W2055677176 @default.
- W4251855879 cites W2057356512 @default.
- W4251855879 cites W2060104127 @default.
- W4251855879 cites W2065239354 @default.
- W4251855879 cites W2070611256 @default.
- W4251855879 cites W2073844587 @default.
- W4251855879 cites W2087286400 @default.
- W4251855879 cites W2107533816 @default.
- W4251855879 cites W2108613461 @default.
- W4251855879 doi "https://doi.org/10.7567/jjap.51.111501" @default.
- W4251855879 hasPublicationYear "2012" @default.
- W4251855879 type Work @default.
- W4251855879 citedByCount "0" @default.
- W4251855879 crossrefType "journal-article" @default.
- W4251855879 hasAuthorship W4251855879A5018559639 @default.
- W4251855879 hasAuthorship W4251855879A5021804147 @default.
- W4251855879 hasAuthorship W4251855879A5046731462 @default.
- W4251855879 hasAuthorship W4251855879A5053447705 @default.
- W4251855879 hasAuthorship W4251855879A5066392216 @default.
- W4251855879 hasAuthorship W4251855879A5067416815 @default.
- W4251855879 hasAuthorship W4251855879A5085304432 @default.
- W4251855879 hasConcept C102519508 @default.
- W4251855879 hasConcept C113196181 @default.
- W4251855879 hasConcept C120665830 @default.
- W4251855879 hasConcept C121332964 @default.
- W4251855879 hasConcept C133386390 @default.
- W4251855879 hasConcept C153642686 @default.
- W4251855879 hasConcept C158355884 @default.
- W4251855879 hasConcept C160671074 @default.
- W4251855879 hasConcept C160892712 @default.
- W4251855879 hasConcept C178790620 @default.
- W4251855879 hasConcept C185592680 @default.
- W4251855879 hasConcept C192562407 @default.
- W4251855879 hasConcept C199360897 @default.
- W4251855879 hasConcept C2779866884 @default.
- W4251855879 hasConcept C32891209 @default.
- W4251855879 hasConcept C41008148 @default.
- W4251855879 hasConcept C41610221 @default.
- W4251855879 hasConcept C43617362 @default.
- W4251855879 hasConcept C49040817 @default.
- W4251855879 hasConcept C49102809 @default.
- W4251855879 hasConcept C62520636 @default.
- W4251855879 hasConcept C65682993 @default.
- W4251855879 hasConceptScore W4251855879C102519508 @default.
- W4251855879 hasConceptScore W4251855879C113196181 @default.
- W4251855879 hasConceptScore W4251855879C120665830 @default.
- W4251855879 hasConceptScore W4251855879C121332964 @default.
- W4251855879 hasConceptScore W4251855879C133386390 @default.
- W4251855879 hasConceptScore W4251855879C153642686 @default.
- W4251855879 hasConceptScore W4251855879C158355884 @default.
- W4251855879 hasConceptScore W4251855879C160671074 @default.
- W4251855879 hasConceptScore W4251855879C160892712 @default.
- W4251855879 hasConceptScore W4251855879C178790620 @default.
- W4251855879 hasConceptScore W4251855879C185592680 @default.
- W4251855879 hasConceptScore W4251855879C192562407 @default.
- W4251855879 hasConceptScore W4251855879C199360897 @default.
- W4251855879 hasConceptScore W4251855879C2779866884 @default.
- W4251855879 hasConceptScore W4251855879C32891209 @default.
- W4251855879 hasConceptScore W4251855879C41008148 @default.
- W4251855879 hasConceptScore W4251855879C41610221 @default.
- W4251855879 hasConceptScore W4251855879C43617362 @default.
- W4251855879 hasConceptScore W4251855879C49040817 @default.
- W4251855879 hasConceptScore W4251855879C49102809 @default.
- W4251855879 hasConceptScore W4251855879C62520636 @default.
- W4251855879 hasConceptScore W4251855879C65682993 @default.
- W4251855879 hasIssue "11R" @default.