Matches in SemOpenAlex for { <https://semopenalex.org/work/W4251862231> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W4251862231 endingPage "136" @default.
- W4251862231 startingPage "129" @default.
- W4251862231 abstract "Films of copper metal have been grown on two different oxide substrate materials by atomic layer deposition. The film depositions were carried out in the temperature range 375–475 °C. Copper(I) chloride, water and hydrogen were used as precursors. Two deposition schemes were used and compared, one including water (CuCl/H2O/H2) and another without water (CuCl/H2). It was found that the addition of water enhanced growth rate on alumina substrates up to four times compared to the water-free deposition process. Hence, the extra water step leads to faster copper formation kinetics than from the direct reaction between CuCl and H2. On the contrary, film growth rate increased when water was excluded from the deposition process on fused silica substrates, indicating that the additional water did not lower the activation energy for the total reaction. The film growth rate was also more sensitive to changes in hydrogen pulse length and partial pressure on SiO2 substrates (i.e. hydrogen dosing). Randomly oriented polycrystalline films were obtained on amorphous SiO2, whereas on single crystalline α-Al2O3 substrates with orientations (001), (110) and (102), films showed a strong Cu(111) texture. Finally, the film morphology was rough due to island growth behaviour." @default.
- W4251862231 created "2022-05-12" @default.
- W4251862231 creator A5052028873 @default.
- W4251862231 date "2004-06-01" @default.
- W4251862231 modified "2023-10-18" @default.
- W4251862231 title "Growth of copper metal by atomic layer deposition using copper(I) chloride, water and hydrogen as precursors" @default.
- W4251862231 doi "https://doi.org/10.1016/s0040-6090(03)01978-3" @default.
- W4251862231 hasPublicationYear "2004" @default.
- W4251862231 type Work @default.
- W4251862231 citedByCount "0" @default.
- W4251862231 crossrefType "journal-article" @default.
- W4251862231 hasAuthorship W4251862231A5052028873 @default.
- W4251862231 hasConcept C111368507 @default.
- W4251862231 hasConcept C127313418 @default.
- W4251862231 hasConcept C127413603 @default.
- W4251862231 hasConcept C147789679 @default.
- W4251862231 hasConcept C151730666 @default.
- W4251862231 hasConcept C171250308 @default.
- W4251862231 hasConcept C178790620 @default.
- W4251862231 hasConcept C179104552 @default.
- W4251862231 hasConcept C185592680 @default.
- W4251862231 hasConcept C19067145 @default.
- W4251862231 hasConcept C191897082 @default.
- W4251862231 hasConcept C192562407 @default.
- W4251862231 hasConcept C2776977220 @default.
- W4251862231 hasConcept C2777289219 @default.
- W4251862231 hasConcept C2778695967 @default.
- W4251862231 hasConcept C2779227376 @default.
- W4251862231 hasConcept C2779851234 @default.
- W4251862231 hasConcept C2816523 @default.
- W4251862231 hasConcept C42360764 @default.
- W4251862231 hasConcept C512968161 @default.
- W4251862231 hasConcept C544153396 @default.
- W4251862231 hasConcept C544778455 @default.
- W4251862231 hasConcept C56052488 @default.
- W4251862231 hasConcept C64297162 @default.
- W4251862231 hasConcept C69544855 @default.
- W4251862231 hasConcept C8010536 @default.
- W4251862231 hasConcept C86803240 @default.
- W4251862231 hasConcept C95121573 @default.
- W4251862231 hasConceptScore W4251862231C111368507 @default.
- W4251862231 hasConceptScore W4251862231C127313418 @default.
- W4251862231 hasConceptScore W4251862231C127413603 @default.
- W4251862231 hasConceptScore W4251862231C147789679 @default.
- W4251862231 hasConceptScore W4251862231C151730666 @default.
- W4251862231 hasConceptScore W4251862231C171250308 @default.
- W4251862231 hasConceptScore W4251862231C178790620 @default.
- W4251862231 hasConceptScore W4251862231C179104552 @default.
- W4251862231 hasConceptScore W4251862231C185592680 @default.
- W4251862231 hasConceptScore W4251862231C19067145 @default.
- W4251862231 hasConceptScore W4251862231C191897082 @default.
- W4251862231 hasConceptScore W4251862231C192562407 @default.
- W4251862231 hasConceptScore W4251862231C2776977220 @default.
- W4251862231 hasConceptScore W4251862231C2777289219 @default.
- W4251862231 hasConceptScore W4251862231C2778695967 @default.
- W4251862231 hasConceptScore W4251862231C2779227376 @default.
- W4251862231 hasConceptScore W4251862231C2779851234 @default.
- W4251862231 hasConceptScore W4251862231C2816523 @default.
- W4251862231 hasConceptScore W4251862231C42360764 @default.
- W4251862231 hasConceptScore W4251862231C512968161 @default.
- W4251862231 hasConceptScore W4251862231C544153396 @default.
- W4251862231 hasConceptScore W4251862231C544778455 @default.
- W4251862231 hasConceptScore W4251862231C56052488 @default.
- W4251862231 hasConceptScore W4251862231C64297162 @default.
- W4251862231 hasConceptScore W4251862231C69544855 @default.
- W4251862231 hasConceptScore W4251862231C8010536 @default.
- W4251862231 hasConceptScore W4251862231C86803240 @default.
- W4251862231 hasConceptScore W4251862231C95121573 @default.
- W4251862231 hasIssue "1-2" @default.
- W4251862231 hasLocation W42518622311 @default.
- W4251862231 hasOpenAccess W4251862231 @default.
- W4251862231 hasPrimaryLocation W42518622311 @default.
- W4251862231 hasRelatedWork W1984046217 @default.
- W4251862231 hasRelatedWork W1988501380 @default.
- W4251862231 hasRelatedWork W2000420579 @default.
- W4251862231 hasRelatedWork W2083668428 @default.
- W4251862231 hasRelatedWork W2098501271 @default.
- W4251862231 hasRelatedWork W2137108081 @default.
- W4251862231 hasRelatedWork W2296061439 @default.
- W4251862231 hasRelatedWork W2510321789 @default.
- W4251862231 hasRelatedWork W4230860654 @default.
- W4251862231 hasRelatedWork W2522100403 @default.
- W4251862231 hasVolume "458" @default.
- W4251862231 isParatext "false" @default.
- W4251862231 isRetracted "false" @default.
- W4251862231 workType "article" @default.