Matches in SemOpenAlex for { <https://semopenalex.org/work/W4254757221> ?p ?o ?g. }
- W4254757221 endingPage "06GM09" @default.
- W4254757221 startingPage "06GM09" @default.
- W4254757221 abstract "Micropumps are important components of advanced microfluidic systems. Here, polyimide (PI) as an advantageous structural material for flexible micropumps was focused on. This is because PI has many advantageous properties such as high thermal stability and superior mechanical strength. However, the difficulty in realizing an all-PI micropump lies in fabricating microstructures on PI film surfaces. In this paper, we present a novel all-PI micropump fabricated using hot embossing. The micropump had diffuser/nozzle valves and functioned by vibrating a 2-µm-thick PI diaphragm with alternating air pressures between 0 and 10 kPa at a frequency of 3 Hz. The height and diameter of the PI micropump chamber were 200 µm and 5 mm, respectively. The flow rate of water in the micropump was 34 µl/min. This micropump is suitable for flexible microfluidic systems." @default.
- W4254757221 created "2022-05-12" @default.
- W4254757221 creator A5004279911 @default.
- W4254757221 creator A5006420522 @default.
- W4254757221 creator A5033535293 @default.
- W4254757221 creator A5047586824 @default.
- W4254757221 creator A5058106587 @default.
- W4254757221 creator A5058326041 @default.
- W4254757221 creator A5066340256 @default.
- W4254757221 creator A5069536133 @default.
- W4254757221 creator A5070977114 @default.
- W4254757221 date "2011-06-01" @default.
- W4254757221 modified "2023-09-27" @default.
- W4254757221 title "Flexible Polyimide Micropump Fabricated Using Hot Embossing" @default.
- W4254757221 cites W1969094628 @default.
- W4254757221 cites W1970052898 @default.
- W4254757221 cites W1981166108 @default.
- W4254757221 cites W1985600727 @default.
- W4254757221 cites W1988025341 @default.
- W4254757221 cites W1992499798 @default.
- W4254757221 cites W1997059728 @default.
- W4254757221 cites W1998728115 @default.
- W4254757221 cites W1999179745 @default.
- W4254757221 cites W1999259150 @default.
- W4254757221 cites W1999735092 @default.
- W4254757221 cites W2002158510 @default.
- W4254757221 cites W2010419444 @default.
- W4254757221 cites W2014747017 @default.
- W4254757221 cites W2017410286 @default.
- W4254757221 cites W2018783029 @default.
- W4254757221 cites W2025658223 @default.
- W4254757221 cites W2026087730 @default.
- W4254757221 cites W2027968656 @default.
- W4254757221 cites W2030252093 @default.
- W4254757221 cites W2030840049 @default.
- W4254757221 cites W2034488599 @default.
- W4254757221 cites W2038481766 @default.
- W4254757221 cites W2040853060 @default.
- W4254757221 cites W2058660795 @default.
- W4254757221 cites W2067508817 @default.
- W4254757221 cites W2075973007 @default.
- W4254757221 cites W2084356694 @default.
- W4254757221 cites W2085641267 @default.
- W4254757221 cites W2090119879 @default.
- W4254757221 cites W2092938694 @default.
- W4254757221 cites W2171461249 @default.
- W4254757221 doi "https://doi.org/10.7567/jjap.50.06gm09" @default.
- W4254757221 hasPublicationYear "2011" @default.
- W4254757221 type Work @default.
- W4254757221 citedByCount "15" @default.
- W4254757221 countsByYear W42547572212013 @default.
- W4254757221 countsByYear W42547572212014 @default.
- W4254757221 countsByYear W42547572212016 @default.
- W4254757221 countsByYear W42547572212017 @default.
- W4254757221 countsByYear W42547572212019 @default.
- W4254757221 countsByYear W42547572212020 @default.
- W4254757221 countsByYear W42547572212021 @default.
- W4254757221 crossrefType "journal-article" @default.
- W4254757221 hasAuthorship W4254757221A5004279911 @default.
- W4254757221 hasAuthorship W4254757221A5006420522 @default.
- W4254757221 hasAuthorship W4254757221A5033535293 @default.
- W4254757221 hasAuthorship W4254757221A5047586824 @default.
- W4254757221 hasAuthorship W4254757221A5058106587 @default.
- W4254757221 hasAuthorship W4254757221A5058326041 @default.
- W4254757221 hasAuthorship W4254757221A5066340256 @default.
- W4254757221 hasAuthorship W4254757221A5069536133 @default.
- W4254757221 hasAuthorship W4254757221A5070977114 @default.
- W4254757221 hasConcept C119599485 @default.
- W4254757221 hasConcept C120665830 @default.
- W4254757221 hasConcept C121332964 @default.
- W4254757221 hasConcept C127413603 @default.
- W4254757221 hasConcept C136525101 @default.
- W4254757221 hasConcept C142724271 @default.
- W4254757221 hasConcept C157138929 @default.
- W4254757221 hasConcept C159985019 @default.
- W4254757221 hasConcept C164292776 @default.
- W4254757221 hasConcept C171250308 @default.
- W4254757221 hasConcept C172120300 @default.
- W4254757221 hasConcept C192562407 @default.
- W4254757221 hasConcept C204787440 @default.
- W4254757221 hasConcept C2776392700 @default.
- W4254757221 hasConcept C2779227376 @default.
- W4254757221 hasConcept C2780565730 @default.
- W4254757221 hasConcept C2780965675 @default.
- W4254757221 hasConcept C2982854487 @default.
- W4254757221 hasConcept C49040817 @default.
- W4254757221 hasConcept C56200935 @default.
- W4254757221 hasConcept C62520636 @default.
- W4254757221 hasConcept C71924100 @default.
- W4254757221 hasConcept C76272257 @default.
- W4254757221 hasConcept C78519656 @default.
- W4254757221 hasConcept C8673954 @default.
- W4254757221 hasConceptScore W4254757221C119599485 @default.
- W4254757221 hasConceptScore W4254757221C120665830 @default.
- W4254757221 hasConceptScore W4254757221C121332964 @default.
- W4254757221 hasConceptScore W4254757221C127413603 @default.
- W4254757221 hasConceptScore W4254757221C136525101 @default.
- W4254757221 hasConceptScore W4254757221C142724271 @default.