Matches in SemOpenAlex for { <https://semopenalex.org/work/W4256145557> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W4256145557 endingPage "1890" @default.
- W4256145557 startingPage "1890" @default.
- W4256145557 abstract "Abstract not Available." @default.
- W4256145557 created "2022-05-12" @default.
- W4256145557 creator A5025688985 @default.
- W4256145557 creator A5035163405 @default.
- W4256145557 creator A5039052923 @default.
- W4256145557 creator A5040180614 @default.
- W4256145557 creator A5041772832 @default.
- W4256145557 creator A5081281643 @default.
- W4256145557 date "2008-08-29" @default.
- W4256145557 modified "2023-10-18" @default.
- W4256145557 title "Batch Atomic Layer Deposition of HfO2 and ZrO2 Films Using Cyclopentadienyl Precursors" @default.
- W4256145557 doi "https://doi.org/10.1149/ma2008-02/24/1890" @default.
- W4256145557 hasPublicationYear "2008" @default.
- W4256145557 type Work @default.
- W4256145557 citedByCount "1" @default.
- W4256145557 crossrefType "journal-article" @default.
- W4256145557 hasAuthorship W4256145557A5025688985 @default.
- W4256145557 hasAuthorship W4256145557A5035163405 @default.
- W4256145557 hasAuthorship W4256145557A5039052923 @default.
- W4256145557 hasAuthorship W4256145557A5040180614 @default.
- W4256145557 hasAuthorship W4256145557A5041772832 @default.
- W4256145557 hasAuthorship W4256145557A5081281643 @default.
- W4256145557 hasBestOaLocation W42561455571 @default.
- W4256145557 hasConcept C127313418 @default.
- W4256145557 hasConcept C127413603 @default.
- W4256145557 hasConcept C151730666 @default.
- W4256145557 hasConcept C161790260 @default.
- W4256145557 hasConcept C171250308 @default.
- W4256145557 hasConcept C178790620 @default.
- W4256145557 hasConcept C181458950 @default.
- W4256145557 hasConcept C185592680 @default.
- W4256145557 hasConcept C192562407 @default.
- W4256145557 hasConcept C2779227376 @default.
- W4256145557 hasConcept C2816523 @default.
- W4256145557 hasConcept C42360764 @default.
- W4256145557 hasConcept C62960913 @default.
- W4256145557 hasConcept C64297162 @default.
- W4256145557 hasConcept C69544855 @default.
- W4256145557 hasConceptScore W4256145557C127313418 @default.
- W4256145557 hasConceptScore W4256145557C127413603 @default.
- W4256145557 hasConceptScore W4256145557C151730666 @default.
- W4256145557 hasConceptScore W4256145557C161790260 @default.
- W4256145557 hasConceptScore W4256145557C171250308 @default.
- W4256145557 hasConceptScore W4256145557C178790620 @default.
- W4256145557 hasConceptScore W4256145557C181458950 @default.
- W4256145557 hasConceptScore W4256145557C185592680 @default.
- W4256145557 hasConceptScore W4256145557C192562407 @default.
- W4256145557 hasConceptScore W4256145557C2779227376 @default.
- W4256145557 hasConceptScore W4256145557C2816523 @default.
- W4256145557 hasConceptScore W4256145557C42360764 @default.
- W4256145557 hasConceptScore W4256145557C62960913 @default.
- W4256145557 hasConceptScore W4256145557C64297162 @default.
- W4256145557 hasConceptScore W4256145557C69544855 @default.
- W4256145557 hasIssue "24" @default.
- W4256145557 hasLocation W42561455571 @default.
- W4256145557 hasOpenAccess W4256145557 @default.
- W4256145557 hasPrimaryLocation W42561455571 @default.
- W4256145557 hasRelatedWork W1983692613 @default.
- W4256145557 hasRelatedWork W1998534931 @default.
- W4256145557 hasRelatedWork W2005014777 @default.
- W4256145557 hasRelatedWork W2102458125 @default.
- W4256145557 hasRelatedWork W2124861464 @default.
- W4256145557 hasRelatedWork W2271217798 @default.
- W4256145557 hasRelatedWork W2600470417 @default.
- W4256145557 hasRelatedWork W3015015342 @default.
- W4256145557 hasRelatedWork W3081152880 @default.
- W4256145557 hasRelatedWork W4256145557 @default.
- W4256145557 hasVolume "MA2008-02" @default.
- W4256145557 isParatext "false" @default.
- W4256145557 isRetracted "false" @default.
- W4256145557 workType "article" @default.