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- W4256190989 endingPage "75" @default.
- W4256190989 startingPage "71" @default.
- W4256190989 abstract "A sensor technology which uses silicon nitride membranes together with monocrystalline silicon is presented. Silicon structures below the membranes are defined by a p+ etch stop technique and structured by KOH etching. The technology can be applied to mechanical as well as for thermal transducers." @default.
- W4256190989 created "2022-05-12" @default.
- W4256190989 creator A5041423669 @default.
- W4256190989 date "1995-10-01" @default.
- W4256190989 modified "2023-10-01" @default.
- W4256190989 title "Silicon nitride membrane sensors with monocrystalline transducers" @default.
- W4256190989 doi "https://doi.org/10.1016/0924-4247(96)80055-0" @default.
- W4256190989 hasPublicationYear "1995" @default.
- W4256190989 type Work @default.
- W4256190989 citedByCount "0" @default.
- W4256190989 crossrefType "journal-article" @default.
- W4256190989 hasAuthorship W4256190989A5041423669 @default.
- W4256190989 hasConcept C100460472 @default.
- W4256190989 hasConcept C119599485 @default.
- W4256190989 hasConcept C127413603 @default.
- W4256190989 hasConcept C139159486 @default.
- W4256190989 hasConcept C171250308 @default.
- W4256190989 hasConcept C185592680 @default.
- W4256190989 hasConcept C192562407 @default.
- W4256190989 hasConcept C194760766 @default.
- W4256190989 hasConcept C26953177 @default.
- W4256190989 hasConcept C2777431650 @default.
- W4256190989 hasConcept C2779227376 @default.
- W4256190989 hasConcept C41625074 @default.
- W4256190989 hasConcept C49040817 @default.
- W4256190989 hasConcept C544956773 @default.
- W4256190989 hasConcept C55493867 @default.
- W4256190989 hasConcept C56318395 @default.
- W4256190989 hasConceptScore W4256190989C100460472 @default.
- W4256190989 hasConceptScore W4256190989C119599485 @default.
- W4256190989 hasConceptScore W4256190989C127413603 @default.
- W4256190989 hasConceptScore W4256190989C139159486 @default.
- W4256190989 hasConceptScore W4256190989C171250308 @default.
- W4256190989 hasConceptScore W4256190989C185592680 @default.
- W4256190989 hasConceptScore W4256190989C192562407 @default.
- W4256190989 hasConceptScore W4256190989C194760766 @default.
- W4256190989 hasConceptScore W4256190989C26953177 @default.
- W4256190989 hasConceptScore W4256190989C2777431650 @default.
- W4256190989 hasConceptScore W4256190989C2779227376 @default.
- W4256190989 hasConceptScore W4256190989C41625074 @default.
- W4256190989 hasConceptScore W4256190989C49040817 @default.
- W4256190989 hasConceptScore W4256190989C544956773 @default.
- W4256190989 hasConceptScore W4256190989C55493867 @default.
- W4256190989 hasConceptScore W4256190989C56318395 @default.
- W4256190989 hasIssue "1" @default.
- W4256190989 hasLocation W42561909891 @default.
- W4256190989 hasOpenAccess W4256190989 @default.
- W4256190989 hasPrimaryLocation W42561909891 @default.
- W4256190989 hasRelatedWork W2053452029 @default.
- W4256190989 hasRelatedWork W2075308121 @default.
- W4256190989 hasRelatedWork W2114160525 @default.
- W4256190989 hasRelatedWork W2159044476 @default.
- W4256190989 hasRelatedWork W2296200299 @default.
- W4256190989 hasRelatedWork W2389558144 @default.
- W4256190989 hasRelatedWork W2390238469 @default.
- W4256190989 hasRelatedWork W2545291692 @default.
- W4256190989 hasRelatedWork W2742666901 @default.
- W4256190989 hasRelatedWork W4206851760 @default.
- W4256190989 hasVolume "51" @default.
- W4256190989 isParatext "false" @default.
- W4256190989 isRetracted "false" @default.
- W4256190989 workType "article" @default.