Matches in SemOpenAlex for { <https://semopenalex.org/work/W4280509558> ?p ?o ?g. }
- W4280509558 endingPage "7491" @default.
- W4280509558 startingPage "7483" @default.
- W4280509558 abstract "We demonstrate the development of a new atmospheric pressure-atomic layer deposition(AP-ALD) system to coat the inner walls of capillary columns for gas chromatography (GC). Unlike traditional ALD, this reactor operates at near-atmospheric pressure and addresses the challenges of depositing thin films inside capillaries, which include long pump down times, deposition in high-aspect-ratio materials, and temperature control. We show ALD of alumina in 5 and 12 m capillaries (0.53 mm ID) via sequential half reactions of trimethylaluminum and water. Our system yields pinhole-free, uniform thin films. It includes small witness chambers for witness silicon shards before and after the capillary. An engineering flow/transport analysis of the device is provided. Our ALD alumina thin films are characterized by spectroscopic ellipsometry (SE), X-ray photoelectron spectroscopy, transmission electron microscopy (TEM), and energy-dispersive X-ray spectroscopy. Alumina film growth achieved is 1.4-1.5 Å/cycle, which is consistent with previously reported results. Film thickness measurements by SE on witness shards of silicon and by TEM at both ends of the capillary are in good agreement. A capillary column coated with alumina is used to separate different gases by GC, although the retention times of gases are essentially the same as with an untreated fused silica capillary. This successful deposition of ALD alumina in long capillaries opens the door for other possible ALD coatings, including hybrid organic-inorganic coatings, using the 450+ ALD precursors available today." @default.
- W4280509558 created "2022-05-22" @default.
- W4280509558 creator A5007356514 @default.
- W4280509558 creator A5009307547 @default.
- W4280509558 creator A5022617155 @default.
- W4280509558 creator A5033043658 @default.
- W4280509558 creator A5039436225 @default.
- W4280509558 creator A5044385533 @default.
- W4280509558 creator A5051974576 @default.
- W4280509558 creator A5061698760 @default.
- W4280509558 creator A5065278492 @default.
- W4280509558 date "2022-05-17" @default.
- W4280509558 modified "2023-09-23" @default.
- W4280509558 title "Flow-Through Atmospheric Pressure-Atomic Layer Deposition Reactor for Thin-Film Deposition in Capillary Columns" @default.
- W4280509558 cites W1513388132 @default.
- W4280509558 cites W1861780496 @default.
- W4280509558 cites W1974675977 @default.
- W4280509558 cites W1977292655 @default.
- W4280509558 cites W1978705034 @default.
- W4280509558 cites W1984519031 @default.
- W4280509558 cites W1985738380 @default.
- W4280509558 cites W1994342303 @default.
- W4280509558 cites W1995191254 @default.
- W4280509558 cites W1995624990 @default.
- W4280509558 cites W2000586537 @default.
- W4280509558 cites W2014304271 @default.
- W4280509558 cites W2024484920 @default.
- W4280509558 cites W2025172217 @default.
- W4280509558 cites W2027410381 @default.
- W4280509558 cites W2027419934 @default.
- W4280509558 cites W2036973363 @default.
- W4280509558 cites W2046994443 @default.
- W4280509558 cites W2048736642 @default.
- W4280509558 cites W2050062041 @default.
- W4280509558 cites W2066649429 @default.
- W4280509558 cites W2076306638 @default.
- W4280509558 cites W2078601925 @default.
- W4280509558 cites W2079283011 @default.
- W4280509558 cites W2080567780 @default.
- W4280509558 cites W2081088864 @default.
- W4280509558 cites W2083697130 @default.
- W4280509558 cites W2085344859 @default.
- W4280509558 cites W2088922841 @default.
- W4280509558 cites W2153905235 @default.
- W4280509558 cites W2158932701 @default.
- W4280509558 cites W2171948735 @default.
- W4280509558 cites W2315454193 @default.
- W4280509558 cites W2317582529 @default.
- W4280509558 cites W2328545421 @default.
- W4280509558 cites W2329443075 @default.
- W4280509558 cites W2470357878 @default.
- W4280509558 cites W2491135105 @default.
- W4280509558 cites W2557056655 @default.
- W4280509558 cites W2618446648 @default.
- W4280509558 cites W2900395965 @default.
- W4280509558 cites W2931684697 @default.
- W4280509558 cites W2941296407 @default.
- W4280509558 cites W2996554894 @default.
- W4280509558 cites W3021132666 @default.
- W4280509558 cites W3021287609 @default.
- W4280509558 cites W3092280282 @default.
- W4280509558 cites W3109787936 @default.
- W4280509558 cites W3134118164 @default.
- W4280509558 cites W49249895 @default.
- W4280509558 cites W946801206 @default.
- W4280509558 doi "https://doi.org/10.1021/acs.analchem.1c05029" @default.
- W4280509558 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/35579626" @default.
- W4280509558 hasPublicationYear "2022" @default.
- W4280509558 type Work @default.
- W4280509558 citedByCount "4" @default.
- W4280509558 countsByYear W42805095582023 @default.
- W4280509558 crossrefType "journal-article" @default.
- W4280509558 hasAuthorship W4280509558A5007356514 @default.
- W4280509558 hasAuthorship W4280509558A5009307547 @default.
- W4280509558 hasAuthorship W4280509558A5022617155 @default.
- W4280509558 hasAuthorship W4280509558A5033043658 @default.
- W4280509558 hasAuthorship W4280509558A5039436225 @default.
- W4280509558 hasAuthorship W4280509558A5044385533 @default.
- W4280509558 hasAuthorship W4280509558A5051974576 @default.
- W4280509558 hasAuthorship W4280509558A5061698760 @default.
- W4280509558 hasAuthorship W4280509558A5065278492 @default.
- W4280509558 hasConcept C113196181 @default.
- W4280509558 hasConcept C127413603 @default.
- W4280509558 hasConcept C151730666 @default.
- W4280509558 hasConcept C159985019 @default.
- W4280509558 hasConcept C171250308 @default.
- W4280509558 hasConcept C175708663 @default.
- W4280509558 hasConcept C178790620 @default.
- W4280509558 hasConcept C18293161 @default.
- W4280509558 hasConcept C185592680 @default.
- W4280509558 hasConcept C19067145 @default.
- W4280509558 hasConcept C192562407 @default.
- W4280509558 hasConcept C196806460 @default.
- W4280509558 hasConcept C2779227376 @default.
- W4280509558 hasConcept C2816523 @default.
- W4280509558 hasConcept C42360764 @default.
- W4280509558 hasConcept C43617362 @default.
- W4280509558 hasConcept C544956773 @default.