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• W4280654370 endingPage "106779" @default.
• W4280654370 startingPage "106779" @default.
• W4280654370 abstract "Nonstoichiometric titanium-oxide (TiOx) films are being extensively studied for MEMS bolometer applications. To have superior bolometer performance, the TiOx layers should have a high value of temperature coefficient of resistivity (TCR) and a low value of thermal conductivity. This paper presents the evolution of the electrical and thermal properties of RF sputtered TiOx films with the film thickness and stoichiometry. A series of amorphous TiOx films of 100 nm, 200 nm, and 400 nm thickness are deposited with different oxygen flow rates. X-ray photoelectron spectroscopy (XPS) study revealed the presence of only Ti4+ and Ti3+ oxidation states in the deposited films, and no TiO phase exists (no Ti2+ state). The oxygen-titanium atomic ratios (O/Ti) of the films are 1.5, 1.7, and 1.9. The TCR of the films is increased (from -1.1 %/K to -4.8%/K) with the increased oxygen content. The cross-plane thermal conductivities of the films are by the 3-ω technique. The thermal conductivity of the TiOx films is increased (0.5 W/m-K to 2.4 W/m-K) with the increase in film thickness and is independent of its ‘x’ values. Characteristics of MEMS bolometer pixel (17 mm pitch) are simulated based on the measured properties of the TiOx films. The film having 2.75 %/K TCR and 1.12 W/m-K thermal conductivity, exhibited minimum NETD (37.3 mK) with decent voltage responsivity (1.62x106 V/W)." @default.
• W4280654370 created "2022-05-22" @default.
• W4280654370 creator A5000951381 @default.
• W4280654370 creator A5015269967 @default.
• W4280654370 creator A5017231699 @default.
• W4280654370 creator A5042190943 @default.
• W4280654370 creator A5046008601 @default.
• W4280654370 creator A5053878164 @default.
• W4280654370 creator A5058969643 @default.
• W4280654370 creator A5070166361 @default.
• W4280654370 date "2022-09-01" @default.
• W4280654370 modified "2023-10-11" @default.
• W4280654370 title "Compositional, electrical and thermal properties of nonstoichiometric titanium oxide thin films for MEMS bolometer applications" @default.
• W4280654370 cites W1972680534 @default.
• W4280654370 cites W1984386167 @default.
• W4280654370 cites W2006163343 @default.
• W4280654370 cites W2049661927 @default.
• W4280654370 cites W207909 @default.
• W4280654370 cites W2079463700 @default.
• W4280654370 cites W2094831059 @default.
• W4280654370 cites W2222738162 @default.
• W4280654370 cites W2332287436 @default.
• W4280654370 cites W2591646019 @default.
• W4280654370 cites W2598331651 @default.
• W4280654370 cites W2747765890 @default.
• W4280654370 cites W2783497287 @default.
• W4280654370 cites W2792266916 @default.
• W4280654370 cites W2799835424 @default.
• W4280654370 cites W2816555584 @default.
• W4280654370 cites W3012012038 @default.
• W4280654370 cites W3021823958 @default.
• W4280654370 cites W3024358430 @default.
• W4280654370 cites W3099752842 @default.
• W4280654370 doi "https://doi.org/10.1016/j.mssp.2022.106779" @default.
• W4280654370 hasPublicationYear "2022" @default.
• W4280654370 type Work @default.
• W4280654370 citedByCount "4" @default.
• W4280654370 countsByYear W42806543702022 @default.
• W4280654370 countsByYear W42806543702023 @default.
• W4280654370 crossrefType "journal-article" @default.
• W4280654370 hasAuthorship W4280654370A5000951381 @default.
• W4280654370 hasAuthorship W4280654370A5015269967 @default.
• W4280654370 hasAuthorship W4280654370A5017231699 @default.
• W4280654370 hasAuthorship W4280654370A5042190943 @default.
• W4280654370 hasAuthorship W4280654370A5046008601 @default.
• W4280654370 hasAuthorship W4280654370A5053878164 @default.
• W4280654370 hasAuthorship W4280654370A5058969643 @default.
• W4280654370 hasAuthorship W4280654370A5070166361 @default.
• W4280654370 hasConcept C113196181 @default.
• W4280654370 hasConcept C119599485 @default.
• W4280654370 hasConcept C120665830 @default.
• W4280654370 hasConcept C121332964 @default.
• W4280654370 hasConcept C127413603 @default.
• W4280654370 hasConcept C159985019 @default.
• W4280654370 hasConcept C171250308 @default.
• W4280654370 hasConcept C175708663 @default.
• W4280654370 hasConcept C178889773 @default.
• W4280654370 hasConcept C185592680 @default.
• W4280654370 hasConcept C19067145 @default.
• W4280654370 hasConcept C191897082 @default.
• W4280654370 hasConcept C192562407 @default.
• W4280654370 hasConcept C21028948 @default.
• W4280654370 hasConcept C23125352 @default.
• W4280654370 hasConcept C2779851234 @default.
• W4280654370 hasConcept C42360764 @default.
• W4280654370 hasConcept C43617362 @default.
• W4280654370 hasConcept C49040817 @default.
• W4280654370 hasConcept C506065880 @default.
• W4280654370 hasConcept C56052488 @default.
• W4280654370 hasConcept C69990965 @default.
• W4280654370 hasConcept C8010536 @default.
• W4280654370 hasConcept C94915269 @default.
• W4280654370 hasConcept C97346530 @default.
• W4280654370 hasConceptScore W4280654370C113196181 @default.
• W4280654370 hasConceptScore W4280654370C119599485 @default.
• W4280654370 hasConceptScore W4280654370C120665830 @default.
• W4280654370 hasConceptScore W4280654370C121332964 @default.
• W4280654370 hasConceptScore W4280654370C127413603 @default.
• W4280654370 hasConceptScore W4280654370C159985019 @default.
• W4280654370 hasConceptScore W4280654370C171250308 @default.
• W4280654370 hasConceptScore W4280654370C175708663 @default.
• W4280654370 hasConceptScore W4280654370C178889773 @default.
• W4280654370 hasConceptScore W4280654370C185592680 @default.
• W4280654370 hasConceptScore W4280654370C19067145 @default.
• W4280654370 hasConceptScore W4280654370C191897082 @default.
• W4280654370 hasConceptScore W4280654370C192562407 @default.
• W4280654370 hasConceptScore W4280654370C21028948 @default.
• W4280654370 hasConceptScore W4280654370C23125352 @default.
• W4280654370 hasConceptScore W4280654370C2779851234 @default.
• W4280654370 hasConceptScore W4280654370C42360764 @default.
• W4280654370 hasConceptScore W4280654370C43617362 @default.
• W4280654370 hasConceptScore W4280654370C49040817 @default.
• W4280654370 hasConceptScore W4280654370C506065880 @default.
• W4280654370 hasConceptScore W4280654370C56052488 @default.
• W4280654370 hasConceptScore W4280654370C69990965 @default.
• W4280654370 hasConceptScore W4280654370C8010536 @default.
• W4280654370 hasConceptScore W4280654370C94915269 @default.
• W4280654370 hasConceptScore W4280654370C97346530 @default.

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