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- W4281388382 abstract "Abstract Gallium nitride (GaN) films with an almost single-crystalline quality, smooth surface, and high optical transmission were prepared at 580 °C using inductively coupled plasma metal-organic chemical vapor deposition (ICP-MOCVD) based on a showerhead structure. The GaN thin films with unintentional doping were used as the active layer in the production of thin-film transistors (TFTs) and metal–semiconductor–metal (MSM) photodetectors. TFTs had on-to-off current ratios of 6.3 × 10 3 and their output characteristics demonstrated the proper saturation behavior of transistors. The field-effect mobility was 3.79 cm 2 (V s) −1 . MSMs were visible blind, with a contrast of almost three orders of magnitude between ultraviolet and green light. The maximum responsivity was 34 mA W −1 with a 10 V bias voltage and a 325 nm illumination. When the bias voltage was >2 V, the quantum efficiency and noise equivalent power under 266 nm illumination reached >10% and <1 <?CDATA ${text{pW}},{({text{H}}{{text{z}}^{{text{1/2}}}})^{ - 1}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mrow> <mml:mtext>pW</mml:mtext> </mml:mrow> <mml:mrow> <mml:mo stretchy=false>(</mml:mo> <mml:mrow> <mml:mtext>H</mml:mtext> </mml:mrow> <mml:mrow> <mml:msup> <mml:mrow> <mml:mtext>z</mml:mtext> </mml:mrow> <mml:mrow> <mml:mrow> <mml:mtext>1/2</mml:mtext> </mml:mrow> </mml:mrow> </mml:msup> </mml:mrow> <mml:mrow> <mml:msup> <mml:mo stretchy=false>)</mml:mo> <mml:mrow> <mml:mo>−</mml:mo> <mml:mn>1</mml:mn> </mml:mrow> </mml:msup> </mml:mrow> </mml:mrow> </mml:math> , respectively. These findings suggest that the ICP-MOCVD technique has the potential to be used to fabricate (opto)electronic devices at low temperatures." @default.
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- W4281388382 date "2022-06-21" @default.
- W4281388382 modified "2023-09-27" @default.
- W4281388382 title "Thin film transistors and metal–semiconductor–metal photodetectors based on GaN thin films grown by inductively coupled plasma metal-organic chemical vapor deposition" @default.
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- W4281388382 doi "https://doi.org/10.1088/1361-6463/ac7263" @default.
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