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• W4281560993 abstract "We present a 1 × 3 optical switch based on a translational microelectromechanical system (MEMS) platform with integrated silicon nitride (SiN) photonic waveguides. The fabricated devices demonstrate efficient optical signal transmission between fixed and suspended movable waveguides. We report a minimum average insertion loss of 4.64 dB and a maximum average insertion loss of 5.83 dB in different switching positions over a wavelength range of 1530 nm to 1580 nm. The unique gap closing mechanism reduces the average insertion loss across two air gaps by a maximum of 7.89 dB. The optical switch was fabricated using a custom microfabrication process developed by AEPONYX Inc. This microfabrication process integrates SiN waveguides with silicon-on-insulator based MEMS devices with minimal stress related deformation of the MEMS platform." @default.
• W4281560993 created "2022-05-27" @default.
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• W4281560993 date "2022-06-03" @default.
• W4281560993 modified "2023-10-05" @default.
• W4281560993 title "Integrated 1 × 3 MEMS silicon nitride photonics switch" @default.
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• W4281560993 doi "https://doi.org/10.1364/oe.460533" @default.
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