Matches in SemOpenAlex for { <https://semopenalex.org/work/W4281566214> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W4281566214 abstract "Spin Orbit Torque (SOT) magnetic random-access memory (MRAM) offers the possibility to realize non-volatile ultra-high-speed technology. SOT-MRAM can also potentially reduce embedded memory footprint, which would inturn reduce silicon cost. However, there are certain challenges to overcome for SOT integration with logic. SOTMRAM needs a tall ‘VIA’ for the MTJ connection to the transistor. The height of this tall ‘VIA’ can vary from 60nm to 300nm for the N5 technology node. The VIA Critical Dimension (CD) depends upon metal width (30nm) which connects MTJ to read transistor. Thus, the aspect ratio needed for proper SOT integration is at least 10. This high aspect ratio is a major challenge for SOT integration, but it can be reduced (even down to 2) at the cost of SOT and MTJ stack integration complexity. On the other hand, keeping WL spacing constant and reducing WL width to facilitate increased MTJ connecting metal width (hence improve the AR for the same height) will increase the WL resistance. This WL resistance increment degrades WL delay as parasitic resistance is more problematic than capacitance at advanced nodes. In conclusion, while a tall VIA for SOT-MRAM has integration challenges due to the high VIA aspect ratio, mitigating this by means of wider VIA CD can potentially increase WL delay. Therefore, a comprehensive DTCO considering different bit-cells, SOT integration options and Memory performance is needed for SOT technology to be adopted at the most advanced technology nodes." @default.
- W4281566214 created "2022-05-27" @default.
- W4281566214 creator A5018168075 @default.
- W4281566214 creator A5024595358 @default.
- W4281566214 creator A5041762660 @default.
- W4281566214 creator A5071123608 @default.
- W4281566214 creator A5072821632 @default.
- W4281566214 creator A5074053801 @default.
- W4281566214 creator A5080181961 @default.
- W4281566214 creator A5090036991 @default.
- W4281566214 date "2022-05-26" @default.
- W4281566214 modified "2023-10-12" @default.
- W4281566214 title "Challenges with SOT-MRAM integration towards N5 node and beyond" @default.
- W4281566214 doi "https://doi.org/10.1117/12.2613482" @default.
- W4281566214 hasPublicationYear "2022" @default.
- W4281566214 type Work @default.
- W4281566214 citedByCount "0" @default.
- W4281566214 crossrefType "proceedings-article" @default.
- W4281566214 hasAuthorship W4281566214A5018168075 @default.
- W4281566214 hasAuthorship W4281566214A5024595358 @default.
- W4281566214 hasAuthorship W4281566214A5041762660 @default.
- W4281566214 hasAuthorship W4281566214A5071123608 @default.
- W4281566214 hasAuthorship W4281566214A5072821632 @default.
- W4281566214 hasAuthorship W4281566214A5074053801 @default.
- W4281566214 hasAuthorship W4281566214A5080181961 @default.
- W4281566214 hasAuthorship W4281566214A5090036991 @default.
- W4281566214 hasConcept C119599485 @default.
- W4281566214 hasConcept C121332964 @default.
- W4281566214 hasConcept C127413603 @default.
- W4281566214 hasConcept C165801399 @default.
- W4281566214 hasConcept C171250308 @default.
- W4281566214 hasConcept C172385210 @default.
- W4281566214 hasConcept C17525397 @default.
- W4281566214 hasConcept C177409738 @default.
- W4281566214 hasConcept C192562407 @default.
- W4281566214 hasConcept C2779227376 @default.
- W4281566214 hasConcept C2994168587 @default.
- W4281566214 hasConcept C30066665 @default.
- W4281566214 hasConcept C41008148 @default.
- W4281566214 hasConcept C46362747 @default.
- W4281566214 hasConcept C46891859 @default.
- W4281566214 hasConcept C49040817 @default.
- W4281566214 hasConcept C53524968 @default.
- W4281566214 hasConcept C56202322 @default.
- W4281566214 hasConcept C62520636 @default.
- W4281566214 hasConcept C62611344 @default.
- W4281566214 hasConcept C66938386 @default.
- W4281566214 hasConcept C9390403 @default.
- W4281566214 hasConceptScore W4281566214C119599485 @default.
- W4281566214 hasConceptScore W4281566214C121332964 @default.
- W4281566214 hasConceptScore W4281566214C127413603 @default.
- W4281566214 hasConceptScore W4281566214C165801399 @default.
- W4281566214 hasConceptScore W4281566214C171250308 @default.
- W4281566214 hasConceptScore W4281566214C172385210 @default.
- W4281566214 hasConceptScore W4281566214C17525397 @default.
- W4281566214 hasConceptScore W4281566214C177409738 @default.
- W4281566214 hasConceptScore W4281566214C192562407 @default.
- W4281566214 hasConceptScore W4281566214C2779227376 @default.
- W4281566214 hasConceptScore W4281566214C2994168587 @default.
- W4281566214 hasConceptScore W4281566214C30066665 @default.
- W4281566214 hasConceptScore W4281566214C41008148 @default.
- W4281566214 hasConceptScore W4281566214C46362747 @default.
- W4281566214 hasConceptScore W4281566214C46891859 @default.
- W4281566214 hasConceptScore W4281566214C49040817 @default.
- W4281566214 hasConceptScore W4281566214C53524968 @default.
- W4281566214 hasConceptScore W4281566214C56202322 @default.
- W4281566214 hasConceptScore W4281566214C62520636 @default.
- W4281566214 hasConceptScore W4281566214C62611344 @default.
- W4281566214 hasConceptScore W4281566214C66938386 @default.
- W4281566214 hasConceptScore W4281566214C9390403 @default.
- W4281566214 hasLocation W42815662141 @default.
- W4281566214 hasOpenAccess W4281566214 @default.
- W4281566214 hasPrimaryLocation W42815662141 @default.
- W4281566214 hasRelatedWork W2015163736 @default.
- W4281566214 hasRelatedWork W2049017294 @default.
- W4281566214 hasRelatedWork W2058368504 @default.
- W4281566214 hasRelatedWork W2077125610 @default.
- W4281566214 hasRelatedWork W2102840382 @default.
- W4281566214 hasRelatedWork W2103577429 @default.
- W4281566214 hasRelatedWork W2109595167 @default.
- W4281566214 hasRelatedWork W2169001642 @default.
- W4281566214 hasRelatedWork W2560292000 @default.
- W4281566214 hasRelatedWork W3136329537 @default.
- W4281566214 isParatext "false" @default.
- W4281566214 isRetracted "false" @default.
- W4281566214 workType "article" @default.