Matches in SemOpenAlex for { <https://semopenalex.org/work/W4281677807> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W4281677807 endingPage "553" @default.
- W4281677807 startingPage "549" @default.
- W4281677807 abstract "This work details two approaches with multi-epitaxial growth to create a vertical superjunction structure made of alternating pillars. One approach is a chain of very high energy implants, the other uses a preferred implantation direction to achieve a channeled profile. The manufactured devices show a breakdown voltage of 1000 V for channeled, two-step epi with total 4.9 μm thickness. 800 V for regular high energy implants using three epi steps of total 3.7 μm thickness. The measured Rsp was 0.7 mOhm*cm 2 for dies with size 0.018 cm 2 . UIS and temperature measurement show reliable performance. The channeled implant looks favorable to reduce the number of process steps needed to create an efficient superjunction structure." @default.
- W4281677807 created "2022-06-13" @default.
- W4281677807 creator A5019376287 @default.
- W4281677807 creator A5020733820 @default.
- W4281677807 creator A5025234496 @default.
- W4281677807 creator A5031535729 @default.
- W4281677807 creator A5034508664 @default.
- W4281677807 creator A5036940015 @default.
- W4281677807 creator A5045273404 @default.
- W4281677807 creator A5046190435 @default.
- W4281677807 creator A5049665453 @default.
- W4281677807 creator A5077644715 @default.
- W4281677807 creator A5081753627 @default.
- W4281677807 date "2022-05-31" @default.
- W4281677807 modified "2023-09-27" @default.
- W4281677807 title "SiC Diode with Vertical Superjunction Realized Using Channeled Implant and Multi-Step Epitaxial Growth" @default.
- W4281677807 cites W1998763552 @default.
- W4281677807 cites W2588561742 @default.
- W4281677807 cites W2884494842 @default.
- W4281677807 cites W2920093637 @default.
- W4281677807 cites W3087792033 @default.
- W4281677807 doi "https://doi.org/10.4028/p-ix1o7m" @default.
- W4281677807 hasPublicationYear "2022" @default.
- W4281677807 type Work @default.
- W4281677807 citedByCount "1" @default.
- W4281677807 countsByYear W42816778072023 @default.
- W4281677807 crossrefType "journal-article" @default.
- W4281677807 hasAuthorship W4281677807A5019376287 @default.
- W4281677807 hasAuthorship W4281677807A5020733820 @default.
- W4281677807 hasAuthorship W4281677807A5025234496 @default.
- W4281677807 hasAuthorship W4281677807A5031535729 @default.
- W4281677807 hasAuthorship W4281677807A5034508664 @default.
- W4281677807 hasAuthorship W4281677807A5036940015 @default.
- W4281677807 hasAuthorship W4281677807A5045273404 @default.
- W4281677807 hasAuthorship W4281677807A5046190435 @default.
- W4281677807 hasAuthorship W4281677807A5049665453 @default.
- W4281677807 hasAuthorship W4281677807A5077644715 @default.
- W4281677807 hasAuthorship W4281677807A5081753627 @default.
- W4281677807 hasBestOaLocation W42816778071 @default.
- W4281677807 hasConcept C110738630 @default.
- W4281677807 hasConcept C119599485 @default.
- W4281677807 hasConcept C121332964 @default.
- W4281677807 hasConcept C127413603 @default.
- W4281677807 hasConcept C141071460 @default.
- W4281677807 hasConcept C159985019 @default.
- W4281677807 hasConcept C165801399 @default.
- W4281677807 hasConcept C186370098 @default.
- W4281677807 hasConcept C18762648 @default.
- W4281677807 hasConcept C192562407 @default.
- W4281677807 hasConcept C2779227376 @default.
- W4281677807 hasConcept C2781411149 @default.
- W4281677807 hasConcept C49040817 @default.
- W4281677807 hasConcept C62520636 @default.
- W4281677807 hasConcept C71924100 @default.
- W4281677807 hasConcept C78434282 @default.
- W4281677807 hasConcept C78519656 @default.
- W4281677807 hasConceptScore W4281677807C110738630 @default.
- W4281677807 hasConceptScore W4281677807C119599485 @default.
- W4281677807 hasConceptScore W4281677807C121332964 @default.
- W4281677807 hasConceptScore W4281677807C127413603 @default.
- W4281677807 hasConceptScore W4281677807C141071460 @default.
- W4281677807 hasConceptScore W4281677807C159985019 @default.
- W4281677807 hasConceptScore W4281677807C165801399 @default.
- W4281677807 hasConceptScore W4281677807C186370098 @default.
- W4281677807 hasConceptScore W4281677807C18762648 @default.
- W4281677807 hasConceptScore W4281677807C192562407 @default.
- W4281677807 hasConceptScore W4281677807C2779227376 @default.
- W4281677807 hasConceptScore W4281677807C2781411149 @default.
- W4281677807 hasConceptScore W4281677807C49040817 @default.
- W4281677807 hasConceptScore W4281677807C62520636 @default.
- W4281677807 hasConceptScore W4281677807C71924100 @default.
- W4281677807 hasConceptScore W4281677807C78434282 @default.
- W4281677807 hasConceptScore W4281677807C78519656 @default.
- W4281677807 hasLocation W42816778071 @default.
- W4281677807 hasOpenAccess W4281677807 @default.
- W4281677807 hasPrimaryLocation W42816778071 @default.
- W4281677807 hasRelatedWork W1504272055 @default.
- W4281677807 hasRelatedWork W2001429041 @default.
- W4281677807 hasRelatedWork W2009964935 @default.
- W4281677807 hasRelatedWork W2058676402 @default.
- W4281677807 hasRelatedWork W2071614893 @default.
- W4281677807 hasRelatedWork W2104118485 @default.
- W4281677807 hasRelatedWork W2326537118 @default.
- W4281677807 hasRelatedWork W2329285141 @default.
- W4281677807 hasRelatedWork W2902546961 @default.
- W4281677807 hasRelatedWork W4313653414 @default.
- W4281677807 hasVolume "1062" @default.
- W4281677807 isParatext "false" @default.
- W4281677807 isRetracted "false" @default.
- W4281677807 workType "article" @default.