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• W4281703300 abstract "The feasibility of using direct broad band optical monitoring control in the fabrication of the ultra-steep dichroic filters based on resonant structures is investigated. Using computational manufacturing and deposition experiments, the role of the errors self-compensation effect is clarified by comparing the results of direct broad band optical monitoring and time monitoring. The errors correlation strength of ultra-steep dichroic filter is analyzed and it shows that the correlation calculated by the current model is not strong. The relationship between errors correlation and errors self-compensation effect for the ultra-steep dichroic filter is discussed." @default.
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• W4281703300 date "2022-06-06" @default.
• W4281703300 modified "2023-10-11" @default.
• W4281703300 title "Production of ultra-steep dichroic filters with broad band optical monitoring" @default.
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• W4281703300 doi "https://doi.org/10.1364/oe.460811" @default.
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