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• W4281760478 abstract "This paper reports on a MEMS gravimeter that has a closed-loop system to maintain an ultra-low resonance frequency of 1Hz. The low resonance frequency is attained by using a spring that is the resultant of positive mechanical stiffnesses and negative electrical stiffnesses. Voltage-tunability of the electrical stiffness enables ultra-small and tunable total stiffness. To attain a quick response even at the low resonance frequency, an amplitude monitoring and tuning are done at a higher off-resonance frequency of 330Hz. We demonstrate through simulations that the temperature dependence of the resonance frequency can be eliminated by using closed-loop tuning. To prevent issues caused by the ultra-small stiffness, we employ a force-balanced system that nulls the mass displacement. The sensitivity of the gravimeter is found to be 57V/Gal." @default.
• W4281760478 created "2022-06-13" @default.
• W4281760478 creator A5020629042 @default.
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• W4281760478 date "2022-05-08" @default.
• W4281760478 modified "2023-09-27" @default.
• W4281760478 title "Ultra-Low Resonance Frequency Mems Gravimeter with Off-Resonance Closed-Loop Control" @default.
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• W4281760478 doi "https://doi.org/10.1109/inertial53425.2022.9787739" @default.
• W4281760478 hasPublicationYear "2022" @default.
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