Matches in SemOpenAlex for { <https://semopenalex.org/work/W4281772920> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W4281772920 endingPage "32" @default.
- W4281772920 startingPage "28" @default.
- W4281772920 abstract "The fabrication of novel semiconductor seed crystals using hetero-epitaxial growth on substrates such as Si, sapphire, and SiC, which have been successfully grown to large diameter and high quality, is very attractive as a breakthrough technology. However, a critical issue in heteroepitaxial growth is the formation of cracks due to thermal stress caused by the difference in the thermal expansion coefficient between the substrate and the growth layer during the cooling process after growth. In this study, we propose a method to reduce thermal stress by using a Flexible substrate, which is a substrate with mechanical flexibility enhanced by removing more than 80% of its volume with periodic through holes. Using this method, we obtained an AlN hetero-epitaxial growth layer with absolutely no cracks observed. This method is applicable not only for AlN on SiC but also for the fabrication of various new semiconductor materials." @default.
- W4281772920 created "2022-06-13" @default.
- W4281772920 creator A5037311301 @default.
- W4281772920 creator A5046629540 @default.
- W4281772920 creator A5050182531 @default.
- W4281772920 creator A5051158409 @default.
- W4281772920 date "2022-05-31" @default.
- W4281772920 modified "2023-10-14" @default.
- W4281772920 title "A Novel Approach of Utilizing Mechanically Flexible SiC Substrate to Grow Crack-Free AlN Bulk Crystal by Thermal Strain Relaxation Functionality" @default.
- W4281772920 cites W1979643271 @default.
- W4281772920 cites W1986624983 @default.
- W4281772920 cites W1999860788 @default.
- W4281772920 cites W2005397049 @default.
- W4281772920 cites W2024892216 @default.
- W4281772920 cites W2059905503 @default.
- W4281772920 cites W2067688095 @default.
- W4281772920 cites W2081260316 @default.
- W4281772920 cites W2770720685 @default.
- W4281772920 cites W2809923792 @default.
- W4281772920 doi "https://doi.org/10.4028/p-85ph3t" @default.
- W4281772920 hasPublicationYear "2022" @default.
- W4281772920 type Work @default.
- W4281772920 citedByCount "0" @default.
- W4281772920 crossrefType "journal-article" @default.
- W4281772920 hasAuthorship W4281772920A5037311301 @default.
- W4281772920 hasAuthorship W4281772920A5046629540 @default.
- W4281772920 hasAuthorship W4281772920A5050182531 @default.
- W4281772920 hasAuthorship W4281772920A5051158409 @default.
- W4281772920 hasBestOaLocation W42817729201 @default.
- W4281772920 hasConcept C108225325 @default.
- W4281772920 hasConcept C110738630 @default.
- W4281772920 hasConcept C111368507 @default.
- W4281772920 hasConcept C120665830 @default.
- W4281772920 hasConcept C121332964 @default.
- W4281772920 hasConcept C127313418 @default.
- W4281772920 hasConcept C136525101 @default.
- W4281772920 hasConcept C138885662 @default.
- W4281772920 hasConcept C142724271 @default.
- W4281772920 hasConcept C149912024 @default.
- W4281772920 hasConcept C159985019 @default.
- W4281772920 hasConcept C192562407 @default.
- W4281772920 hasConcept C202974441 @default.
- W4281772920 hasConcept C204787440 @default.
- W4281772920 hasConcept C21036866 @default.
- W4281772920 hasConcept C2777289219 @default.
- W4281772920 hasConcept C2779227376 @default.
- W4281772920 hasConcept C2780064504 @default.
- W4281772920 hasConcept C41895202 @default.
- W4281772920 hasConcept C47463417 @default.
- W4281772920 hasConcept C49040817 @default.
- W4281772920 hasConcept C520434653 @default.
- W4281772920 hasConcept C71924100 @default.
- W4281772920 hasConceptScore W4281772920C108225325 @default.
- W4281772920 hasConceptScore W4281772920C110738630 @default.
- W4281772920 hasConceptScore W4281772920C111368507 @default.
- W4281772920 hasConceptScore W4281772920C120665830 @default.
- W4281772920 hasConceptScore W4281772920C121332964 @default.
- W4281772920 hasConceptScore W4281772920C127313418 @default.
- W4281772920 hasConceptScore W4281772920C136525101 @default.
- W4281772920 hasConceptScore W4281772920C138885662 @default.
- W4281772920 hasConceptScore W4281772920C142724271 @default.
- W4281772920 hasConceptScore W4281772920C149912024 @default.
- W4281772920 hasConceptScore W4281772920C159985019 @default.
- W4281772920 hasConceptScore W4281772920C192562407 @default.
- W4281772920 hasConceptScore W4281772920C202974441 @default.
- W4281772920 hasConceptScore W4281772920C204787440 @default.
- W4281772920 hasConceptScore W4281772920C21036866 @default.
- W4281772920 hasConceptScore W4281772920C2777289219 @default.
- W4281772920 hasConceptScore W4281772920C2779227376 @default.
- W4281772920 hasConceptScore W4281772920C2780064504 @default.
- W4281772920 hasConceptScore W4281772920C41895202 @default.
- W4281772920 hasConceptScore W4281772920C47463417 @default.
- W4281772920 hasConceptScore W4281772920C49040817 @default.
- W4281772920 hasConceptScore W4281772920C520434653 @default.
- W4281772920 hasConceptScore W4281772920C71924100 @default.
- W4281772920 hasLocation W42817729201 @default.
- W4281772920 hasOpenAccess W4281772920 @default.
- W4281772920 hasPrimaryLocation W42817729201 @default.
- W4281772920 hasRelatedWork W1998456755 @default.
- W4281772920 hasRelatedWork W2042307861 @default.
- W4281772920 hasRelatedWork W2055754760 @default.
- W4281772920 hasRelatedWork W2056652851 @default.
- W4281772920 hasRelatedWork W2066877724 @default.
- W4281772920 hasRelatedWork W2071614893 @default.
- W4281772920 hasRelatedWork W2083791368 @default.
- W4281772920 hasRelatedWork W2117118161 @default.
- W4281772920 hasRelatedWork W2162712791 @default.
- W4281772920 hasRelatedWork W2540917032 @default.
- W4281772920 hasVolume "1062" @default.
- W4281772920 isParatext "false" @default.
- W4281772920 isRetracted "false" @default.
- W4281772920 workType "article" @default.